发明授权
- 专利标题: Dual gate FinFet
- 专利标题(中): 双门FinFet
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申请号: US10717737申请日: 2003-11-20
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公开(公告)号: US07091566B2公开(公告)日: 2006-08-15
- 发明人: Huilong Zhu , Jochen Beintner , Bruce B. Doris , Ying Zhang
- 申请人: Huilong Zhu , Jochen Beintner , Bruce B. Doris , Ying Zhang
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corp.
- 当前专利权人: International Business Machines Corp.
- 当前专利权人地址: US NY Armonk
- 代理机构: Law Office of Charles W. Peterson, Jr.
- 代理商 Wan Yee Chung, Esq.
- 主分类号: H01L29/76
- IPC分类号: H01L29/76 ; H01L29/94 ; H01L31/062 ; H01L31/113 ; H01L31/119
摘要:
A field effect transistor (FET), integrated circuit (IC) chip including the FETs and a method of forming the FETS. Each FET includes a device gate along one side of a semiconductor (e.g., silicon) fin and a back bias gate along an opposite of the fin. Back bias gate dielectric differs from the device gate dielectric either in its material and/or thickness. Device thresholds can be adjusted by adjusting back bias gate voltage.
公开/授权文献
- US20050110085A1 Dual gate finfet 公开/授权日:2005-05-26
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