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US07098487B2 Gallium nitride crystal and method of making same 有权
氮化镓晶体及其制造方法

Gallium nitride crystal and method of making same
Abstract:
There is provided a GaN single crystal at least about 2 millimeters in diameter, with a dislocation density less than about 104 cm−1, and having no tilt boundaries. A method of forming a GaN single crystal is also disclosed. The method includes providing a nucleation center, a GaN source material, and a GaN solvent in a chamber. The chamber is pressurized. First and second temperature distributions are generated in the chamber such that the solvent is supersaturated in the nucleation region of the chamber. The first and second temperature distributions have different temperature gradients within the chamber.
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