发明授权
- 专利标题： Stabilizers to inhibit the polymerization of substituted cyclotetrasiloxane
- 专利标题（中）： 抑制取代环四硅氧烷聚合的稳定剂
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申请号： US10602279申请日： 2003-06-23
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公开(公告)号： US07101948B2公开(公告)日： 2006-09-05
- 发明人: Steven Gerard Mayorga , Manchao Xiao , Thomas Richard Gaffney , Robert George Syvret
- 申请人： Steven Gerard Mayorga , Manchao Xiao , Thomas Richard Gaffney , Robert George Syvret
- 申请人地址： US PA Allentown
- 专利权人： Air Products and Chemicals, Inc.
- 当前专利权人： Air Products and Chemicals, Inc.
- 当前专利权人地址： US PA Allentown
- 代理商 Geoffrey L. Chase; Rosaleen P. Morris-Oskanian; Joseph D. Rossi
- 主分类号： C07F7/21
- IPC分类号： C07F7/21
摘要：
The present invention is; (a) a process for stabilizing a cyclotetrasiloxane, such as 1,3,5,7-tetramethylcyclotetrasiloxane, against polymerization used in a chemical vapor deposition process for silicon oxides in electronic material fabrication comprising providing an effective amount of a free radical scavenger polymerization inhibitor to such cyclotetrasiloxane; and (b) a composition of a cyclotetrasiloxane, such as 1,3,5,7-tetramethylcyclotetrasiloxane, stabilized against polymerization used in a chemical vapor deposition process as a precursor for silicon oxides in electronic material fabrication, comprising; such cyclotetrasiloxane and a free radical scavenger polymerization inhibitor.