- 专利标题: Test apparatus for semiconductor device
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申请号: US10073129申请日: 2002-02-13
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公开(公告)号: US07107504B2公开(公告)日: 2006-09-12
- 发明人: Masahiro Sato , Junji Akaza , Nobumi Kodama , Hirohisa Mizuno , Takashi Imura , Yasurou Matsuzaki
- 申请人: Masahiro Sato , Junji Akaza , Nobumi Kodama , Hirohisa Mizuno , Takashi Imura , Yasurou Matsuzaki
- 申请人地址: JP Kawasaki
- 专利权人: Fujitsu Limited
- 当前专利权人: Fujitsu Limited
- 当前专利权人地址: JP Kawasaki
- 代理机构: Arent Fox PLLC
- 优先权: JP2001-199188 20010629
- 主分类号: G01R31/28
- IPC分类号: G01R31/28 ; G11C29/00
摘要:
A test apparatus for a semiconductor device, which improves the reliability of an operational test on target devices on a wafer using BOST (Built Out Self Test) and BIST (Built In Self Test). The test apparatus includes an external test unit, the BIST circuit formed in the semiconductor device, and BOST device which is coupled between the external test unit and the semiconductor device. Pattern data for a pattern dependency test is stored in the BIST circuit and pattern data for a timing dependency test is stored in the BOST device.
公开/授权文献
- US20030002365A1 Test apparatus for semiconductor device 公开/授权日:2003-01-02
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