- 专利标题: Transistor structure with thick recessed source/drain structures and fabrication process of same
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申请号: US11007843申请日: 2004-12-09
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公开(公告)号: US07132339B2公开(公告)日: 2006-11-07
- 发明人: Andres Bryant , Mark D. Jaffe
- 申请人: Andres Bryant , Mark D. Jaffe
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Schmeiser, Olsen & Watts
- 代理商 William D. Sabo
- 主分类号: H01L21/36
- IPC分类号: H01L21/36 ; H01L21/38
摘要:
An improved transistor structure that decreases source/drain (S/D) resistance without increasing gate-to-S/D capacitance, thereby increasing device operation. S/D structures are formed into recesses formed on a semiconductor wafer through a semiconductor layer and a first layer of a buried insulator having at least two layers. A body is formed from the semiconductor layer situated between the recesses, and the body comprises a top body surface and a bottom body surface that define a body thickness. Top portions of the S/D structures are within and abut the body thickness. An improved method for forming the improved transistor structure is also described and comprises: forming recesses through a semiconductor layer and a first layer of a buried insulator so that a body is situated between the recesses; and forming S/D structures into the recesses so that top portions of the S/D structures are within and abut a body thickness.
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