发明授权
US07142000B2 Mounting spring elements on semiconductor devices, and wafer-level testing methodology
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在半导体器件上安装弹簧元件,以及晶圆级测试方法
- 专利标题: Mounting spring elements on semiconductor devices, and wafer-level testing methodology
- 专利标题(中): 在半导体器件上安装弹簧元件,以及晶圆级测试方法
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申请号: US10673686申请日: 2003-09-29
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公开(公告)号: US07142000B2公开(公告)日: 2006-11-28
- 发明人: Benjamin N. Eldridge , Gary W. Grube , Igor Y. Khandros , Gaetan L. Mathieu
- 申请人: Benjamin N. Eldridge , Gary W. Grube , Igor Y. Khandros , Gaetan L. Mathieu
- 申请人地址: US CA Livermore
- 专利权人: FormFactor, Inc.
- 当前专利权人: FormFactor, Inc.
- 当前专利权人地址: US CA Livermore
- 代理商 N. Kenneth Burraston
- 主分类号: G01R31/28
- IPC分类号: G01R31/28 ; G01R1/073
摘要:
Resilient contact structures are mounted directly to bond pads on semiconductor dies, prior to the dies being singulated (separated) from a semiconductor wafer. This enables the semiconductor dies to be exercised (e.g., tested and/or burned-in) by connecting to the semiconductor dies with a circuit board or the like having a plurality of terminals disposed on a surface thereof. Subsequently, the semiconductor dies may be singulated from the semiconductor wafer, whereupon the same resilient contact structures can be used to effect interconnections between the semiconductor dies and other electronic components (such as wiring substrates, semiconductor packages, etc.). Using the all-metallic composite interconnection elements of the present invention as the resilient contact structures, burn-in can be performed at temperatures of at least 150° C., and can be completed in less than 60 minutes.
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