发明授权
- 专利标题: Apparatus for mounting semiconductors
- 专利标题(中): 半导体安装装置
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申请号: US10845050申请日: 2004-05-12
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公开(公告)号: US07146718B2公开(公告)日: 2006-12-12
- 发明人: Silvan Thuerlemann
- 申请人: Silvan Thuerlemann
- 申请人地址: CH Cham
- 专利权人: ESEC Trading SA
- 当前专利权人: ESEC Trading SA
- 当前专利权人地址: CH Cham
- 代理机构: Thelen Reid & Priest LLP
- 代理商 David B. Ritchie
- 优先权: CH0933/03 20030521
- 主分类号: H05K13/04
- IPC分类号: H05K13/04
摘要:
When mounting semiconductor chips, the semiconductor chips are presented on a wafer table where they are picked one after the other by a pick and place system, transported and placed onto a substrate that rests on a supporting surface of a substrate table. The wafer table is aligned diagonally to the supporting surface of the substrate table whereby part of the wafer table is located under the substrate table. The pick and place system comprises a shuttle with a swivel arm carrying a bondhead. The swivel arm is swivelled back and forth between two predetermined swivel positions whereby in the first swivel position a longitudinal axis of the swivel arm embraces the angle φ with the perpendicular to the supporting surface of the substrate table and whereby in the second swivel position the longitudinal axis of the swivel arm runs orthogonally to the supporting surface of the substrate table.
公开/授权文献
- US20050011067A1 Apparatus for mounting semiconductors 公开/授权日:2005-01-20
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