发明授权
- 专利标题: Wafer dicing/die bonding sheet
- 专利标题(中): 晶片切片/芯片粘合片
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申请号: US10713163申请日: 2003-11-17
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公开(公告)号: US07147920B2公开(公告)日: 2006-12-12
- 发明人: Toshio Shiobara , Nobuhiro Ichiroku , Hideki Akiba , Masachika Yoshino
- 申请人: Toshio Shiobara , Nobuhiro Ichiroku , Hideki Akiba , Masachika Yoshino
- 申请人地址: JP Tokyo
- 专利权人: Shin-Etsu Chemical Co., Ltd.
- 当前专利权人: Shin-Etsu Chemical Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
- 优先权: JP2002-333149 20021118
- 主分类号: B32B27/38
- IPC分类号: B32B27/38 ; B32B27/28 ; C08L63/00 ; C08L79/08 ; C08L83/10
摘要:
In a wafer dicing/die bonding sheet comprising a backing member, an adhesive layer, and a protective member, the adhesive layer is made of an adhesive composition comprising a phenolic hydroxyl radical-bearing polyimide resin, an epoxy resin, and an epoxy resin curing agent, the ratio of the total weight of the epoxy resin and the epoxy resin curing agent to the weight of the polyimide resin being from 0.1:1 to 3:1. Due to heat resistance, improved adhesive properties and a low modulus of elasticity, the wafer dicing/die bonding sheet is effective for reducing the warpage of a chip after die bonding.
公开/授权文献
- US20040105990A1 Wafer dicing/die bonding sheet 公开/授权日:2004-06-03
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