发明授权
US07148496B2 System and method for proximity effect correction in imaging systems
失效
成像系统中邻近效应校正的系统和方法
- 专利标题： System and method for proximity effect correction in imaging systems
- 专利标题（中）： 成像系统中邻近效应校正的系统和方法
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申请号： US10823458申请日： 2004-04-13
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公开(公告)号： US07148496B2公开(公告)日： 2006-12-12
- 发明人: Rajesh Menon , Dario Gil , George Barbastathis , Henry I. Smith
- 申请人： Rajesh Menon , Dario Gil , George Barbastathis , Henry I. Smith
- 申请人地址： US MA Cambridge
- 专利权人： Massachusetts Institute of Technology
- 当前专利权人： Massachusetts Institute of Technology
- 当前专利权人地址： US MA Cambridge
- 代理机构： Gauthier & Connors LLP
- 主分类号： H01J37/304
- IPC分类号： H01J37/304
摘要：
A system and method are disclosed for providing error correction in an imaging system. The system includes an error determination unit for determining an amount of error associated with a spot at (x,y) in a binary pattern to be imaged, a determination unit for determining the location of a nearest exposed spot at (xi, yi) for each spot at (x,y), and a dose modification unit for modifying an exposure dose at the nearest exposed spot at (xi, yi) for each spot at (x,y).
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