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公开(公告)号:US08049963B2
公开(公告)日:2011-11-01
申请号:US12253512
申请日:2008-10-17
申请人: Rajesh Menon , Paul Rogge , Hsin-Yu Tsai
发明人: Rajesh Menon , Paul Rogge , Hsin-Yu Tsai
CPC分类号: G02B27/4288 , G02B3/10 , G02B27/4211
摘要: A dichromatic lens includes a plurality of zones being arranged on a lens structure, each of the zones having a specified radius and varying height. The lens structure focuses propagating light applicable to any intensity distribution for a plurality of wavelengths.
摘要翻译: 双色透镜包括布置在透镜结构上的多个区域,每个区域具有指定的半径和变化的高度。 透镜结构聚焦适用于多个波长的任何强度分布的传播光。
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公开(公告)号:US20100248159A1
公开(公告)日:2010-09-30
申请号:US12749960
申请日:2010-03-30
CPC分类号: G03B27/00
摘要: An optical material system for nanopatterning is provided that includes one or more material systems having spectrally selective reversible and irreversible transitions by saturating one of the spectrally selective reversible transitions with an optical node retaining a single molecule in a configuration and exposing the single molecule to its spectrally irreversible transitions to form a pattern.
摘要翻译: 提供了一种用于纳米图案的光学材料系统,其包括具有光谱选择性可逆和不可逆转变的一个或多个材料系统,其通过将光谱选择性可逆转换中的一个与保留单个分子的配置中的光学节点饱和,并将单个分子暴露于其光谱 不可逆转的过渡形成一种模式。
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公开(公告)号:US07714988B2
公开(公告)日:2010-05-11
申请号:US11331752
申请日:2006-01-13
申请人: Rajesh Menon , Henry I. Smith
发明人: Rajesh Menon , Henry I. Smith
IPC分类号: G03B27/54
CPC分类号: G03F7/70291 , G03F7/001 , G03F7/203 , G03F7/7005 , G03F7/70275 , G03F7/70316 , G03F7/70408 , G03F7/70466
摘要: A lithography system is disclosed that provides an array of areas of imaging electromagnetic energy that are directed toward a recording medium. The reversible contrast-enhancement material is disposed between the recording medium and the array of areas of imaging electromagnetic energy.
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公开(公告)号:US20100097702A1
公开(公告)日:2010-04-22
申请号:US12253461
申请日:2008-10-17
申请人: Rajesh Menon
发明人: Rajesh Menon
IPC分类号: G02B27/46
CPC分类号: G06T3/4053
摘要: An imaging system is provided. The imaging system includes a point spread function (PSF) module producing a diffraction-limited image of a sample. A convolution module performs convolution of the diffraction-limited image with a first image of a focal spot having a first wavelength to produce a first simulated image. The convolution also performs convolution of the diffraction-limited image with a second image of a focal ring having a second wavelength to produce a second simulated image. A difference module subtracts said first simulated image and said second simulated image to produce said high resolution composite image.
摘要翻译: 提供成像系统。 成像系统包括产生样本的衍射受限图像的点扩散函数(PSF)模块。 卷积模块执行衍射受限图像与具有第一波长的焦点的第一图像的卷积以产生第一模拟图像。 卷积还执行衍射受限图像与具有第二波长的焦环的第二图像的卷积以产生第二模拟图像。 差分模块减去所述第一模拟图像和所述第二模拟图像以产生所述高分辨率合成图像。
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公开(公告)号:US07666580B2
公开(公告)日:2010-02-23
申请号:US12337000
申请日:2008-12-17
申请人: Rajesh Menon , Henry I. Smith
发明人: Rajesh Menon , Henry I. Smith
IPC分类号: G03F7/22
CPC分类号: G03F7/70291 , G03F7/091
摘要: A lithography system is disclosed that includes an array of focusing elements for directing focused illumination toward a recording medium, and a reversible contrast-enhancement material disposed between the recording medium and the array of focusing elements.
摘要翻译: 公开了一种光刻系统,其包括用于将聚焦照明引向记录介质的聚焦元件阵列,以及设置在记录介质和聚焦元件阵列之间的可逆对比度增强材料。
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公开(公告)号:US20090087798A1
公开(公告)日:2009-04-02
申请号:US12338202
申请日:2008-12-18
申请人: Rajesh Menon , Henry I. Smith
发明人: Rajesh Menon , Henry I. Smith
IPC分类号: G03F7/20
CPC分类号: G03F7/70291 , G03F7/001 , G03F7/203 , G03F7/7005 , G03F7/70275 , G03F7/70316 , G03F7/70408 , G03F7/70466
摘要: A lithography system is disclosed that provides an array of areas of imaging electromagnetic energy that are directed toward a recording medium. The reversible contrast-enhancement material is disposed between the recording medium and the array of areas of imaging electromagnetic energy.
摘要翻译: 公开了一种光刻系统,其提供朝向记录介质的成像电磁能的区域阵列。 可逆对比度增强材料设置在记录介质和成像电磁能的区域阵列之间。
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公开(公告)号:US20060183059A1
公开(公告)日:2006-08-17
申请号:US11331752
申请日:2006-01-13
申请人: Rajesh Menon , Henry Smith
发明人: Rajesh Menon , Henry Smith
IPC分类号: G03F7/00
CPC分类号: G03F7/70291 , G03F7/001 , G03F7/203 , G03F7/7005 , G03F7/70275 , G03F7/70316 , G03F7/70408 , G03F7/70466
摘要: A lithography system is disclosed that provides an array of areas of imaging electromagnetic energy that are directed toward a recording medium. The reversible contrast-enhancement material is disposed between the recording medium and the array of areas of imaging electromagnetic energy.
摘要翻译: 公开了一种光刻系统,其提供朝向记录介质的成像电磁能的区域阵列。 可逆对比度增强材料设置在记录介质和成像电磁能的区域阵列之间。
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公开(公告)号:US20050181314A1
公开(公告)日:2005-08-18
申请号:US11082629
申请日:2005-03-16
申请人: Dario Gil , Rajesh Menon , David Carter , Henry Smith , George Barbastathis
发明人: Dario Gil , Rajesh Menon , David Carter , Henry Smith , George Barbastathis
IPC分类号: G03F20060101 , G03F7/20 , G21G5/00 , G21K5/04 , H01J37/317 , H01L27/00
CPC分类号: G03F7/70391 , G03F7/70275
摘要: A maskless lithography system is disclosed that includes an array of focusing elements, each of which focuses an energy beam from an array of sources into an array of focal spots in order to create a permanent pattern on an adjacent substrate.
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公开(公告)号:US09164369B2
公开(公告)日:2015-10-20
申请号:US12749960
申请日:2010-03-30
CPC分类号: G03B27/00
摘要: An optical material system for nanopatterning is provided that includes one or more material systems having spectrally selective reversible and irreversible transitions by saturating one of the spectrally selective reversible transitions with an optical node retaining a single molecule in a configuration and exposing the single molecule to its spectrally irreversible transitions to form a pattern.
摘要翻译: 提供了一种用于纳米图案的光学材料系统,其包括具有光谱选择性可逆和不可逆转变的一个或多个材料系统,其通过将光谱选择性可逆转换中的一个与保留单个分子的配置中的光学节点饱和,并将单个分子暴露于其光谱 不可逆转的过渡形成一种模式。
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公开(公告)号:US08143601B2
公开(公告)日:2012-03-27
申请号:US12186968
申请日:2008-08-06
申请人: Rajesh Menon , Henry I. Smith
发明人: Rajesh Menon , Henry I. Smith
IPC分类号: G01J1/58
CPC分类号: G01Q60/22 , G03F1/50 , G03F1/84 , G03F7/2014
摘要: An imaging system is provided. The imaging system includes a sample to be scanned by the imaging system. An absorbance modulation layer (AML) is positioned in close proximity to the sample and is physically separate from the sample. One or more sub-wavelength apertures are generated within the AML, whose size is determined by the material properties of the AML and the intensities of the illuminating wavelengths. A light source transmits an optical signal through the one or more sub-wavelength apertures generating optical near-fields that are collected for imaging.
摘要翻译: 提供成像系统。 成像系统包括要由成像系统扫描的样品。 吸收调制层(AML)位于样品附近,物理上与样品分开。 在AML内产生一个或多个亚波长孔径,其尺寸由AML的材料特性和照明波长的强度决定。 光源通过一个或多个子波长孔径传输光信号,产生用于成像的光学近场。
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