Invention Grant
- Patent Title: Method of fabricating semiconductor laser
- Patent Title (中): 制造半导体激光器的方法
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Application No.: US10790199Application Date: 2004-03-02
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Publication No.: US07151004B2Publication Date: 2006-12-19
- Inventor: Yoshihisa Tashiro , Zempei Kawazu , Harumi Nishiguchi , Tetsuya Yagi , Akihiro Shima
- Applicant: Yoshihisa Tashiro , Zempei Kawazu , Harumi Nishiguchi , Tetsuya Yagi , Akihiro Shima
- Applicant Address: JP Tokyo
- Assignee: Mitsubishi Denki Kabushiki Kaisha
- Current Assignee: Mitsubishi Denki Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Leydig, Voit & Mayer, Ltd.
- Priority: JP2000-380050 20001214
- Main IPC: H01L31/26
- IPC: H01L31/26

Abstract:
In fabricating a semiconductor laser producing light with a wavelength of 770 to 810 nm, impurities are introduced into an MQW active layer near a light emitting facet of the laser to form a disordered region constituting a window layer. Pump light is applied to the window layer to generate photoluminescence whose wavelength λ dpl (nm) is measured. A blue shift amount λ bl (nm) is defined as the difference between the wavelength λ apl (nm) 0f photoluminescence generated by application of pump light to the active layer on the one hand, and the wavelength λ dpl (nm) of photoluminescence from the window layer under pump light irradiation on the other hand. The blue shift amount λ bl is referenced during the fabrication process in order to predict catastrophic optical damage levels of semiconductor lasers.
Public/Granted literature
- US20040165633A1 Method of fabricating semiconductor laser Public/Granted day:2004-08-26
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