- 专利标题: Determining wafer orientation in spectral imaging
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申请号: US11327222申请日: 2006-01-07
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公开(公告)号: US07151609B2公开(公告)日: 2006-12-19
- 发明人: Scott A. Chalmers , Randall S. Geels
- 申请人: Scott A. Chalmers , Randall S. Geels
- 申请人地址: US CA San Diego
- 专利权人: Filmetrics, Inc.
- 当前专利权人: Filmetrics, Inc.
- 当前专利权人地址: US CA San Diego
- 代理机构: Courtney Staniford & Gregory LLP
- 主分类号: G01B11/28
- IPC分类号: G01B11/28
摘要:
Devices and methods for determining wafer orientation in spectral imaging are described. The devices and methods generate an image of a wafer that includes at least one spectral dimension. One or more properties are determined from the spectral dimension, and a map is generated based on the property. The generated map is compared to at least one other map, and data or information of the comparison is used to locate a region of the wafer, for example a measurement pad or other structure.
公开/授权文献
- US20060164657A1 Determining wafer orientation in spectral imaging 公开/授权日:2006-07-27
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