Invention Grant
US07152011B2 Smart component-based management techniques in a substrate processing system
有权
基于基于组件的管理技术在基板处理系统中的应用
- Patent Title: Smart component-based management techniques in a substrate processing system
- Patent Title (中): 基于基于组件的管理技术在基板处理系统中的应用
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Application No.: US10927161Application Date: 2004-08-25
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Publication No.: US07152011B2Publication Date: 2006-12-19
- Inventor: Neil Benjamin , Richard Alan Gottscho , Nicolas Bright , Robert Steger
- Applicant: Neil Benjamin , Richard Alan Gottscho , Nicolas Bright , Robert Steger
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: IP Strategy Group, P.C.
- Main IPC: G06F19/00
- IPC: G06F19/00

Abstract:
A method of component management in a substrate processing system is disclosed. The substrate processing system has a set of components, at least a plurality of components of the set of components being designated to be smart components, each component of the plurality of components having an intelligent component enhancement (ICE). The method includes querying the plurality of components to request their respective unique identification data from their respective ICEs. The method further includes receiving unique identification data from the plurality of components if any of the plurality of components responds to the querying. The method additionally includes flagging the first component for corrective action if a first component of the plurality of components fails to provide first component unique identification data when the first component identification data is expected.
Public/Granted literature
- US20060047458A1 Smart component-based management techniques in a substrate processing system Public/Granted day:2006-03-02
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