Invention Grant
- Patent Title: Multi-chamber installation for treating objects under vacuum, method for evacuating said installation and evacuation system therefor
- Patent Title (中): 在真空下处理物体的多室安装，用于疏散所述安装和撤离系统的方法
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Application No.: US10492033Application Date: 2002-09-28
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Publication No.: US07156922B2Publication Date: 2007-01-02
- Inventor: Peter Müller , Lutz Arndt
- Applicant: Peter Müller , Lutz Arndt
- Applicant Address: DE Cologne
- Assignee: Leybold Vakuum GmbH
- Current Assignee: Leybold Vakuum GmbH
- Current Assignee Address: DE Cologne
- Agency: Fay, Sharpe, Fagan, Minnich & McKee, LLP
- Priority: DE10150015 20011011
- International Application: PCT/EP02/10918 WO 20020928
- International Announcement: WO03/033761 WO 20030424
- Main IPC: C23C16/44
- IPC: C23C16/44 ; C23C16/54 ; C23C14/22 ; C23C14/56 ; F04C23/00
Abstract:
A multi-chamber installation (1) treats objects under vacuum. An evacuation system (5) is connected to a plurality of chambers (2, 3, 4). To reduce the complexity of the evacuation process, a forepump (5) has several stages (11, 12, 13). Each of said stages is connected to one of the chambers (2, 3, 4).
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Information query
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