Invention Grant
US07156960B2 Method and device for continuous cold plasma deposition of metal coatings
有权
金属涂层连续冷等离子体沉积的方法和装置
- Patent Title: Method and device for continuous cold plasma deposition of metal coatings
- Patent Title (中): 金属涂层连续冷等离子体沉积的方法和装置
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Application No.: US10362585Application Date: 2001-08-23
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Publication No.: US07156960B2Publication Date: 2007-01-02
- Inventor: Pierre Vanden Brande , Alain Weymeersch
- Applicant: Pierre Vanden Brande , Alain Weymeersch
- Applicant Address: BE Limal
- Assignee: Cold Plasma Applications, CPA, SPRL
- Current Assignee: Cold Plasma Applications, CPA, SPRL
- Current Assignee Address: BE Limal
- Agency: Browdy and Neimark, PLLC
- Priority: EP00202942 20000823
- International Application: PCT/BE01/00142 WO 20010823
- International Announcement: WO02/16664 WO 20020228
- Main IPC: C23C14/35
- IPC: C23C14/35 ; C23C16/00

Abstract:
A method for the deposition of a metal layer on a substrate (1) uses a cold plasma inside an enclosure (7) heated to avoid the formation of a metal deposit at its surface. The enclosure has an inlet (21) and an outlet (22) for the substrate with a source of metal vapor between them, made up of an electrode to form a plasma (6) with the substrate or a separate electrically conducting element as a counter-electrode. The deposition metal is introduced in the liquid state in a retention tank (8) and is maintained as a liquid at an essentially constant level during the formation of the metal layer on the substrate. An Independent claim is included for the device used to put this method of coating a substrate into service.
Public/Granted literature
- US20040026234A1 Method and device for continuous cold plasma deposition of metal coatings Public/Granted day:2004-02-12
Information query
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