发明授权
US07157208B2 Positive resist composition and pattern forming method using the same
有权
正型抗蚀剂组合物和使用其的图案形成方法
- 专利标题: Positive resist composition and pattern forming method using the same
- 专利标题(中): 正型抗蚀剂组合物和使用其的图案形成方法
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申请号: US11060533申请日: 2005-02-18
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公开(公告)号: US07157208B2公开(公告)日: 2007-01-02
- 发明人: Tomoya Sasaki , Kazuyoshi Mizutani
- 申请人: Tomoya Sasaki , Kazuyoshi Mizutani
- 申请人地址: JP Kanagawa
- 专利权人: Fuji Photo Film Co., Ltd.
- 当前专利权人: Fuji Photo Film Co., Ltd.
- 当前专利权人地址: JP Kanagawa
- 代理机构: Sughrue Mion, PLLC
- 优先权: JPP.2004-044693 20040220
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; G03F7/30
摘要:
A positive resist composition satisfying all of high sensitivity, high resolution, good pattern profile, good line edge roughness and good in-vacuum PED characteristics, is provided, the positive resist composition comprising: (A) a resin containing a repeating unit having a specific styrene skeleton, which is insoluble or hardly soluble in an alkali developer and becomes soluble in an alkali developer under the action of an acid; (B) a compound capable of generating an acid upon irradiation with actinic rays or radiation; and (C) an organic basic compound, and a pattern formation method using the positive resist composition.
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