Invention Grant
- Patent Title: Toroidal low-field reactive gas source
- Patent Title (中): 环形低场反应气源
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Application No.: US10689165Application Date: 2003-10-20
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Publication No.: US07161112B2Publication Date: 2007-01-09
- Inventor: Donald K. Smith , Xing Chen , William M. Holber , Eric Georgelis
- Applicant: Donald K. Smith , Xing Chen , William M. Holber , Eric Georgelis
- Applicant Address: US MA Wilmington
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Wilmington
- Agency: Proskauer Rose LLP
- Main IPC: B23K10/00
- IPC: B23K10/00

Abstract:
An apparatus for dissociating gases includes a plasma chamber that may be formed from a metallic material and a transformer having a magnetic core surrounding a portion of the plasma chamber and having a primary winding. The apparatus also includes one or more switching semiconductor devices that are directly coupled to a voltage supply and that have an output coupled to the primary winding of the transformer. The one or more switching semiconductor devices drive current in the primary winding that induces a potential inside the chamber that forms a plasma which completes a secondary circuit of the transformer.
Public/Granted literature
- US20040079287A1 Toroidal low-field reactive gas source Public/Granted day:2004-04-29
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