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US07166170B2 Cylinder-based plasma processing system 有权
基于气缸的等离子体处理系统

Cylinder-based plasma processing system
Abstract:
A method and system for reducing the cost of a vacuum processing system by utilizing separately fabricated parts for the walls and the tops and bottoms of chambers. Walls are formed from cylinders (e.g., aluminum tubing or rolled ring forgings), and plates are then hermetically sealed to the top and bottom of the cylinder. Fasteners (and the vacuum inside the chamber) clamp the plates to the cylinder.
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