发明授权
- 专利标题： Methods of forming nanoscopic wire-based devices and arrays
- 专利标题（中）： 形成纳米线基的器件和阵列的方法
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申请号： US11313096申请日： 2005-12-20
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公开(公告)号： US07172953B2公开(公告)日： 2007-02-06
- 发明人: Charles M. Lieber , Thomas Rueckes , Ernesto Joselevich , Kevin Kim
- 申请人： Charles M. Lieber , Thomas Rueckes , Ernesto Joselevich , Kevin Kim
- 申请人地址： US MA Cambridge
- 专利权人： President and Fellows of Harvard College
- 当前专利权人： President and Fellows of Harvard College
- 当前专利权人地址： US MA Cambridge
- 代理机构： Wolf, Greenfield & Sacks, P.C.
- 主分类号： H01L21/20
- IPC分类号： H01L21/20 ; H01L21/36
摘要：
Electrical devices comprised of nanoscopic wires are described, along with methods of their manufacture and use. The nanoscopic wires can be nanotubes, preferably single-walled carbon nanotubes. They can be arranged in crossbar arrays using chemically patterned surfaces for direction, via chemical vapor deposition. Chemical vapor deposition also can be used to form nanotubes in arrays in the presence of directing electric fields, optionally in combination with self-assembled monolayer patterns. Bistable devices are described.
公开/授权文献
- US20060220067A1 Nanoscopic wire-based devices and arrays 公开/授权日：2006-10-05
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