Invention Grant
- Patent Title: Image noise removing method in FIB/SEM complex apparatus
- Patent Title (中): FIB / SEM复合装置中的图像噪声去除方法
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Application No.: US11059434Application Date: 2005-02-16
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Publication No.: US07173261B2Publication Date: 2007-02-06
- Inventor: Takashi Ogawa , Seiji Morita
- Applicant: Takashi Ogawa , Seiji Morita
- Applicant Address: JP
- Assignee: SII NanoTechnology Inc.
- Current Assignee: SII NanoTechnology Inc.
- Current Assignee Address: JP
- Agency: Adams & Wilks
- Priority: JP2004-050465 20040225
- Main IPC: G21K5/10
- IPC: G21K5/10
Abstract:
In an image noise prevention method in a composite system of a scanning electron microscope (SEM) and a focused ion beam apparatus (FIB), noise generated during a blanking period of the FIB is prevented from entering an image generated by the SEM by adjustment of scanning cycles of the FIB and the SEM.
Public/Granted literature
- US20050184252A1 Image noise removing method in FIB/SEM complex apparatus Public/Granted day:2005-08-25
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