发明授权
US07176072B2 Strained silicon devices transfer to glass for display applications
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应变硅器件转移到玻璃上进行显示应用
- 专利标题: Strained silicon devices transfer to glass for display applications
- 专利标题(中): 应变硅器件转移到玻璃上进行显示应用
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申请号: US11046411申请日: 2005-01-28
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公开(公告)号: US07176072B2公开(公告)日: 2007-02-13
- 发明人: Jong-Jan Lee , Jer-Shen Maa , Sheng Teng Hsu
- 申请人: Jong-Jan Lee , Jer-Shen Maa , Sheng Teng Hsu
- 申请人地址: US WA Camas
- 专利权人: Sharp Laboratories of AMerica, Inc
- 当前专利权人: Sharp Laboratories of AMerica, Inc
- 当前专利权人地址: US WA Camas
- 代理商 Robert D. Varitz, PC
- 主分类号: H01L21/84
- IPC分类号: H01L21/84 ; H01L21/00 ; H01L21/658
摘要:
A method of fabricating strained silicon devices for transfer to glass for display applications includes preparing a wafer having a silicon substrate thereon; forming a relaxed SiGe layer on the silicon substrate; forming a strained silicon layer on the relaxed SiGe layer; fabricating an IC device on the strained silicon layer; depositing a dielectric layer on the wafer to cover a gate module of the IC device; smoothing the dielectric; implanting ions to form a defect layer; cutting the wafer into individual silicon dies; preparing a glass panel and the silicon dies for bonding; bonding the silicon dies onto the glass panel to form a bonded structure; annealing the bonded structure; splitting the bonded structure along the defect layer; removing the remaining silicon layer from the silicon substrate and relaxed SiGe layer on the silicon die on the glass panel; and completing the glass panel circuitry.
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