发明授权
- 专利标题: Use of an energy source to convert precursors into patterned semiconductors
- 专利标题(中): 使用能源将前体转化成图案化的半导体
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申请号: US10314607申请日: 2002-12-09
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公开(公告)号: US07176484B2公开(公告)日: 2007-02-13
- 发明人: Ali Afzali-Ardakani , Hendrik Hamann , James A Lacey , David R Medeiros , Praveen Chaudhari , Robert Von Gutfeld
- 申请人: Ali Afzali-Ardakani , Hendrik Hamann , James A Lacey , David R Medeiros , Praveen Chaudhari , Robert Von Gutfeld
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Ohlandt, Greeley, Ruggiero & Perle, L.L.P.
- 代理商 Robert M. Trepp, Esq.
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; H01L35/24
摘要:
The present invention provides a substrate having thereon a patterned small molecule organic semiconductor layer. The present invention also provides a method and a system for the production of the substrate having thereon a patterned small molecule organic semiconductor layer. The substrate with the patterned small molecule organic semiconductor layer is prepared by exposing a region of a substrate having thereon a film of a precursor of a small organic molecule to energy from an energy source to convert the film of a precursor of a small organic molecule to a patterned small molecule organic semiconductor layer.
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