Invention Grant
- Patent Title: Inspecting apparatus for semiconductor device
- Patent Title (中): 半导体器件检测设备
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Application No.: US10823546Application Date: 2004-04-14
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Publication No.: US07176704B2Publication Date: 2007-02-13
- Inventor: Je-hyoung Ryu , Tae-gyu Kim , Soon-kyu Yim , Sung-jin Lee , Jun-ho Lee
- Applicant: Je-hyoung Ryu , Tae-gyu Kim , Soon-kyu Yim , Sung-jin Lee , Jun-ho Lee
- Applicant Address: KR Suwon-Si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-Si
- Agency: Staas & Halsey LLP
- Priority: KR10-2003-0042144 20030626
- Main IPC: G01R31/02
- IPC: G01R31/02

Abstract:
An inspecting apparatus for semiconductor devices including: a match plate; a contact module combined with the match plate, and the match plate including a radiation unit radiating heat from the semiconductor devices to the outside, and a test unit contacting leads of the semiconductor; an insert module installed on a bottom of the contact module, and having a semiconductor device accommodator to accommodate the semiconductor device; and an auxiliary radiation member installed on a bottom of the insert module, and radiating the heat from the semiconductor device to the outside. Accordingly, the inspecting apparatus for semiconductor device according to the present invention performs testing at a constant temperature regardless of heat from the semiconductors by radiating the heat from the semiconductors immediately and efficiently, thereby producing more accurate test results. Accurate testing improves productivity and saves expense by removing faulty test results caused by identifying a qualified semiconductor as a defective semiconductor due to heat radiated from the semiconductor device.
Public/Granted literature
- US20040263194A1 Inspecting apparatus for semiconductor device Public/Granted day:2004-12-30
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