发明授权
- 专利标题: Laser measurement apparatus
- 专利标题(中): 激光测量装置
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申请号: US10823166申请日: 2004-04-13
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公开(公告)号: US07196795B2公开(公告)日: 2007-03-27
- 发明人: Haruo Ura , Makoto Ono , Yasuomi Ohno
- 申请人: Haruo Ura , Makoto Ono , Yasuomi Ohno
- 申请人地址: JP Takamatsu
- 专利权人: Soatec Inc.
- 当前专利权人: Soatec Inc.
- 当前专利权人地址: JP Takamatsu
- 代理机构: Renner, Otto, Boisselle & Sklar, LLP
- 优先权: JP2003-140253 20030519
- 主分类号: G01N21/00
- IPC分类号: G01N21/00
摘要:
A laser measurement apparatus for carrying out measurement using a laser beam that is capable of performing various types of measurement with a simple structure is provided. Optical signal processing units 103, 104, 105 output laser beams λ1, λ2, λ3 having different wavelengths via a common optical path A toward an object to be measured, and detect the laser beams being reflected by a corner cube 100 attached to the object to be measured. A control unit 102 controls motors 110, 111 so that the laser beams return to a predetermined position of a optical position sensing device 117 of an optical signal processing unit 103, according to which the direction of a reflecting mirror 112 is controlled so that the laser beams follow the object. The control unit 102 computes the distance to the object, or the shape, position, speed etc. of the object based on signals detected at the optical signal processing units 104, 105.
公开/授权文献
- US20040233460A1 Laser measurement apparatus 公开/授权日:2004-11-25
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