发明授权
- 专利标题： Semiconductor device testing method and testing equipment
- 专利标题（中）： 半导体器件测试方法和测试设备
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申请号： US11078352申请日： 2005-03-14
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公开(公告)号： US07199600B2公开(公告)日： 2007-04-03
- 发明人: Hitoshi Izuru , Kazuhiro Tashiro
- 申请人： Hitoshi Izuru , Kazuhiro Tashiro
- 申请人地址： JP Kawasaki
- 专利权人： Fujitsu Limited
- 当前专利权人： Fujitsu Limited
- 当前专利权人地址： JP Kawasaki
- 代理机构： Armstrong, Kratz, Quintos, Hanson & Brooks, LLP
- 优先权： JP2004-270680 20040917
- 主分类号： G01R31/26
- IPC分类号： G01R31/26
摘要：
A burn-in testing method to perform tests with a semiconductor device operated in an atmosphere at a prescribed temperature characterized in that operation instruction signals instructing an operation of the semiconductor device are repeatedly supplied while supplying power to the semiconductor device, and increases and decreases in a power supply current corresponding to the operation instruction signals are counted.