发明授权
- 专利标题: Probe card
- 专利标题(中): 探针卡
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申请号: US10709435申请日: 2004-05-05
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公开(公告)号: US07208964B2公开(公告)日: 2007-04-24
- 发明人: Atsushi Mine , Toranosuke Furusho , Kazumichi Machida , Atsuo Urata , Teppei Kimura , Teruhisa Sakata
- 申请人: Atsushi Mine , Toranosuke Furusho , Kazumichi Machida , Atsuo Urata , Teppei Kimura , Teruhisa Sakata
- 申请人地址: JP Amagasaki-Shi
- 专利权人: Nihon Denshizairyo Kabushiki Kaisha
- 当前专利权人: Nihon Denshizairyo Kabushiki Kaisha
- 当前专利权人地址: JP Amagasaki-Shi
- 代理机构: Armstrong, Kratz, Quintos, Hanson & Brooks, LLP.
- 优先权: JP2003-378522 20031107
- 主分类号: G01R31/00
- IPC分类号: G01R31/00 ; G01R31/02 ; G01R31/28
摘要:
It is an object of the present invention to provide an arch type probe capable of enduring a load caused by overdriving even if the probe is miniaturized, and a probe card using the same. An arch type probe 200 has a shape including a first quarter circle arc portion 210 which is supported at one end thereof by the base plate 100 and a second quarter circle arc portion 220 which is connected to the other end of the first quarter circle arc portion 210, extending toward the base plate and a little shorter than the first quarter circle arc portion 221. The top portion of the arch type probe 200 serves as a contact surface brought into contact with an electrode of a semiconductor water B.
公开/授权文献
- US20050099194A1 ARCH TYPE PROBE AND PROBE CARD USING SAME 公开/授权日:2005-05-12
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