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公开(公告)号：US07208964B2
公开(公告)日：2007-04-24
申请号：US10709435
申请日：2004-05-05
申请人： Atsushi Mine , Toranosuke Furusho , Kazumichi Machida , Atsuo Urata , Teppei Kimura , Teruhisa Sakata
发明人： Atsushi Mine , Toranosuke Furusho , Kazumichi Machida , Atsuo Urata , Teppei Kimura , Teruhisa Sakata
CPC分类号： G01R1/06733 , G01R1/0735 , G01R1/07357
摘要： It is an object of the present invention to provide an arch type probe capable of enduring a load caused by overdriving even if the probe is miniaturized, and a probe card using the same. An arch type probe 200 has a shape including a first quarter circle arc portion 210 which is supported at one end thereof by the base plate 100 and a second quarter circle arc portion 220 which is connected to the other end of the first quarter circle arc portion 210, extending toward the base plate and a little shorter than the first quarter circle arc portion 221. The top portion of the arch type probe 200 serves as a contact surface brought into contact with an electrode of a semiconductor water B.
摘要翻译： 本发明的目的是提供一种即使探头小型化也能够承受由过驱动引起的负载的弓形探针，以及使用该弓形探针的探针卡。 拱形探针200具有包括第一四分之一圆弧部分210的形状，第一四分之一圆弧部分210的一端由基板100支撑，第二四分之一圆弧部分220连接到第一四分之一圆弧部分的另一端 210，朝向基板延伸并稍短于第一四分之一圆弧部分221.拱型探针200的顶部用作与半导体水B的电极接触的接触表面。
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公开(公告)号：US06980013B2
公开(公告)日：2005-12-27
申请号：US10919398
申请日：2004-08-17
申请人： Kazumichi Machida , Atsuo Urata , Teppei Kimura
发明人： Kazumichi Machida , Atsuo Urata , Teppei Kimura
CPC分类号： G01R1/07371
摘要： A probe card including rectilinear probes; a guide base plate having an insulating property, in which a plurality of guide holes are formed through which the probes are inserted in a freely movable manner and a length of a guide hole is shorter than a length of a probe; and a plurality of sheet members having an insulating property, disposed above the guide base plate facing the plate, and laminated one on another with a spacing therebetween so as not to be in contact with one another. The tail ends of some of the probes can be brought into contact with the electrode pads on a lowest sheet member, and the tail ends of the other probes penetrate through the lowest sheet member so as to be enabled to be in contact with electrode pads on other sheet members.
摘要翻译： 包括直线探头的探针卡; 具有绝缘性的导向基板，其中形成有多个引导孔，探针以可自由移动的方式被插入，并且引导孔的长度短于探针的长度; 以及具有绝缘性的多个薄片构件，其设置在所述导向基板的与所述板对置的上方，并且彼此间隔开地彼此层叠，以便彼此不接触。 一些探针的尾端可以与最低的片状部件上的电极焊盘接触，另一个探针的尾端穿过最低的片状部件，以便能够与电极焊盘接触 其他板材。
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公开(公告)号：US20070052432A1
公开(公告)日：2007-03-08
申请号：US11224304
申请日：2005-09-13
申请人： Kazumichi Machida , Atsuo Urata , Teppei Kimura
发明人： Kazumichi Machida , Atsuo Urata , Teppei Kimura
IPC分类号： G01R31/02
CPC分类号： G01R1/07371
摘要： The invention aims to provide a vertical type probe card in which a probe can scrape an oxide film on a surface of an electrode of the measurement object, thereby ensuring stable contact with the electrode of the measurement object. A probe card A includes: first and second probes 100a and 100b; a guide substrate 200 in which a plurality of guide holes 210 are formed through which the first and second probes 100a and 100b are inserted in a freely movable manner; a support member 400 provided above the guide substrate 200; a first sheet member 300a of flexibility, attached to the support member 400, having a first electrode pad 310a on its surface, in which a tail end 120a of the first probe 100a projecting out from the guide hole 210 is brought into contact with the first electrode pad 310a; a second sheet member 300b of flexibility, attached to the support member 400, having a second electrode pad 310b on its surface, in which a tail end 120b of the second probe 100b projecting out from the guide hole 210 and penetrating through the first sheet member 300a is brought into contact with the second electrode pad 310b; and vibrating means 500 attached to the support member 400, wherein the vibrating means 500 vibrates the first and second probes 100a and 100b via the support member 400 and the first and second sheet members 300a and 300b.
摘要翻译： 本发明的目的是提供一种垂直型探针卡，其中探针可以在测量对象的电极的表面上刮擦氧化膜，从而确保与测量对象的电极的稳定接触。 探针卡A包括：第一和第二探针100a和100b; 引导基板200，其中形成有多个引导孔210，第一和第二探针100a和100b以可自由移动的方式被插入; 设置在引导基板200上方的支撑部件400; 连接到支撑构件400的第一片状构件300a具有在其表面上的第一电极垫310a，其中从导向孔210突出的第一探针100a的尾端120a进入 与第一电极焊盘310a接触; 附接到支撑构件400的第二片状构件300b，在其表面上具有第二电极焊盘310b，其中第二探针100b的尾端120b从引导孔210突出并穿过 第一片状部件300a与第二电极焊盘310b接触; 以及附接到支撑构件400的振动装置500，其中振动装置500经由支撑构件400和第一和第二片构件300a和300b使第一和第二探针100a和100b振动。
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公开(公告)号：US07268568B2
公开(公告)日：2007-09-11
申请号：US11224304
申请日：2005-09-13
申请人： Kazumichi Machida , Atsuo Urata , Teppei Kimura
发明人： Kazumichi Machida , Atsuo Urata , Teppei Kimura
IPC分类号： G01R31/02
CPC分类号： G01R1/07371
摘要： The invention aims to provide a vertical type probe card in which a probe can scrape an oxide film on a surface of an electrode of the measurement object, thereby ensuring stable contact with the electrode of the measurement object. A probe card A includes: first and second probes 100a and 100b; a guide substrate 200 in which a plurality of guide holes 210 are formed through which the first and second probes 100a and 100b are inserted in a freely movable manner; a support member 400 provided above the guide substrate 200; a first sheet member 300a of flexibility, attached to the support member 400, having a first electrode pad 310a on its surface, in which a tail end 120a of the first probe 100a projecting out from the guide hole 210 is brought into contact with the first electrode pad 310a; a second sheet member 300b of flexibility, attached to the support member 400, having a second electrode pad 310b on its surface, in which a tail end 120b of the second probe 100b projecting out from the guide hole 210 and penetrating through the first sheet member 300a is brought into contact with the second electrode pad 310b; and vibrating means 500 attached to the support member 400, wherein the vibrating means 500 vibrates the first and second probes 100a and 100b via the support member 400 and the first and second sheet members 300a and 300b.
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公开(公告)号：US20050151547A1
公开(公告)日：2005-07-14
申请号：US10919398
申请日：2004-08-17
申请人： Kazumichi Machida , Atsuo Urata , Teppei Kimura
发明人： Kazumichi Machida , Atsuo Urata , Teppei Kimura
CPC分类号： G01R1/07371
摘要： A probe card including rectilinear probes; a guide base plate having an insulating property, in which a plurality of guide holes are formed through which the probes are inserted in a freely movable manner and a length of a guide hole is shorter than a length of a probe; and a plurality of sheet members having an insulating property, disposed above the guide base plate facing the plate, and laminated one on another with a spacing therebetween so as not to be in contact with one another. The tail ends of some of the probes can be brought into contact with the electrode pads on a lowest sheet member, and the tail ends of the other probes penetrate through the lowest sheet member so as to be enabled to be in contact with electrode pads on other sheet members.
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公开(公告)号：US20050184743A1
公开(公告)日：2005-08-25
申请号：US11056278
申请日：2005-02-14
申请人： Teppei Kimura
发明人： Teppei Kimura
CPC分类号： G01R1/07342
摘要： An object of the present invention is to provide a probe card capable of readily arranging a wiring pattern without forming the through hole while using a silicon substrate as a supporting substrate. The probe card comprises: a supporting substrate 100, one surface of which is formed in a pyramid shape having one step; a plurality of probes 200 arranged on the surface of a thick part of the supporting substrate 100; a plurality of bumps 110 arranged on the surface of a thin part of the supporting substrate 100; and a plurality of wiring patterns 120 which are arranged on the one surface of the supporting substrate 100 and electrically connects each of the probes 200 with each of the bumps 110.
摘要翻译： 本发明的目的是提供一种探针卡，其能够在使用硅衬底作为支撑衬底的同时，在不形成通孔的情况下容易地布置布线图案。 探针卡包括：支撑基板100，其一个表面形成为具有一个台阶的金字塔形状; 布置在支撑基板100的厚部的表面上的多个探针200; 布置在支撑基板100的薄部分的表面上的多个凸块110; 以及多个配线图案120，其布置在支撑基板100的一个表面上，并且将每个探针200与每个凸起110电连接。
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