Invention Grant
- Patent Title: Negative resistance field-effect device
- Patent Title (中): 负电阻场效应器件
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Application No.: US10561530Application Date: 2001-09-28
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Publication No.: US07221005B2Publication Date: 2007-05-22
- Inventor: Mutsuo Ogura , Takeyoshi Sugaya , Kee-Youn Jang , Yoshinobu Sugiyama
- Applicant: Mutsuo Ogura , Takeyoshi Sugaya , Kee-Youn Jang , Yoshinobu Sugiyama
- Applicant Address: JP Tokyo JP Kawaguchi-shi
- Assignee: National Institute of Advanced Industrial Science and Technology,Japan Science and Technology Corporation
- Current Assignee: National Institute of Advanced Industrial Science and Technology,Japan Science and Technology Corporation
- Current Assignee Address: JP Tokyo JP Kawaguchi-shi
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
- Priority: JP2001-094464 20010329
- International Application: PCT/JP01/08535 WO 20010928
- International Announcement: WO02/080284 WO 20021010
- Main IPC: H01L31/00
- IPC: H01L31/00

Abstract:
A negative resistance field-effect element that is a negative differential resistance field-effect element capable of achieving negative resistance at a low power supply voltage (low drain voltage) and also enabling securement of a high PVCR is formed on its InP substrate 11 having an asymmetrical V-groove whose surface on one side is a (100) plane and surface on the other side is a (011) plane with an InAlAs barrier layer (12) that has a trench (TR) one of whose opposed lateral faces is a (111) A plane and the other of which is a (331) B plane. An InGaAs quantum wire (13) that has a relatively narrow energy band gap is formed at the trench bottom surface as a high-mobility channel. An InAlAs modulation-doped layer (20) having a relatively wide energy band gap is formed on the quantum wire as a low-mobility channel. A source electrode (42) and a drain electrode (43) each in electrical continuity with the quantum wire (13) constituting the high-mobility channel through a contact layer (30) and extending in the longitudinal direction of the quantum wire (13) as spaced from each other, and a gate electrode (41) provided between the source electrode (42) and the drain electrode (43) to face the low-mobility channel (20) through an insulating layer or a Schottky junction, are provided. Owing to the foregoing configuration, a very narrow-width quantum wire whose lateral confinement size can, without restriction by the lithographic technology limit, be made 100 nm or less is usable as a high-mobility channel, whereby there can be obtained a negative resistance field-effect element that develops a negative characteristic at a low power supply voltage and enables securement of a high PVCR.
Public/Granted literature
- US20060267045A1 Negative resistance field-effect element Public/Granted day:2006-11-30
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