发明授权
- 专利标题： Method for measuring and verifying stepper illumination
- 专利标题（中）： 步进照明的测量和验证方法
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申请号： US11141803申请日： 2005-05-31
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公开(公告)号： US07224437B2公开(公告)日： 2007-05-29
- 发明人: Gökhan Perçin , Abdurrahman Sezginer , Franz Xaver Zach
- 申请人： Gökhan Perçin , Abdurrahman Sezginer , Franz Xaver Zach
- 申请人地址： US CA San Jose
- 专利权人： Invarium, Inc
- 当前专利权人： Invarium, Inc
- 当前专利权人地址： US CA San Jose
- 代理商 Jerry R. Potts
- 主分类号： G03B27/42
- IPC分类号： G03B27/42 ; G03B27/52
摘要：
An apparatus and method for characterizing an illumination pupil of an exposure tool comprises forming a plurality of pinhole test patterns at a plurality of test site locations to facilitate locating test pattern edges for extracting therefrom the illumination pupil characteristics of the exposure tool.
公开/授权文献
- US20060268254A1 Method for measuring and verifying stepper illumination 公开/授权日：2006-11-30
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