发明授权
- 专利标题: Electronic component mounting method and apparatus and ultrasonic bonding head
- 专利标题(中): 电子元件安装方法及设备及超声波焊接头
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申请号: US10508460申请日: 2003-03-27
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公开(公告)号: US07229854B2公开(公告)日: 2007-06-12
- 发明人: Shozo Minamitani , Takaharu Mae , Yasuharu Ueno , Akira Yamada , Shinji Kanayama , Makoto Akita , Nobuhisa Watanabe , Akira Mori , Hiroyuki Naito , Shinya Marumo , Makoto Morikawa
- 申请人: Shozo Minamitani , Takaharu Mae , Yasuharu Ueno , Akira Yamada , Shinji Kanayama , Makoto Akita , Nobuhisa Watanabe , Akira Mori , Hiroyuki Naito , Shinya Marumo , Makoto Morikawa
- 申请人地址: JP Osaka
- 专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人地址: JP Osaka
- 代理机构: Jordan and Hamburg LLP
- 优先权: JP2002-087594 20020327; JP2002-087595 20020327; JP2002-087596 20020327
- 国际申请: PCT/JP03/03906 WO 20030327
- 国际公布: WO03/081644 WO 20031002
- 主分类号: H01L21/50
- IPC分类号: H01L21/50
摘要:
A component mounting apparatus includes a component feeder (20) that feeds a component (2) with its bump electrodes facing down, a mounting head (5) that mounts the component onto a substrate (3), a supporting base (8) that secures the substrate, and a positioning device (6, 7) that aligns the component with the substrate. The mounting head includes an ultrasonic vibration generator (24), an ultrasonic vibration propagation member (34, 38, 54) that conveys the ultrasonic vibration provided by the ultrasonic vibration generator to a working face (33, 41, 57) holding the component as vibration parallel thereto, a pressure loader (22, 23, 39, 55, 59) that applies a pressure load to the working face from a position immediately thereabove in the direction perpendicular thereto, and a heater (32, 47, 49, 50, 51, 52, 53) that heats the vicinity of the working face. Thereby, ultrasonic bonding is carried out with high reliability even if the component has a number of bump electrodes (2a) on its face.
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