发明授权
- 专利标题: Electroplating bath containing wetting agent for defect reduction
- 专利标题(中): 含有润湿剂的电镀浴,用于减少缺陷
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申请号: US10879613申请日: 2004-06-29
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公开(公告)号: US07232513B1公开(公告)日: 2007-06-19
- 发明人: Eric G. Webb , Jonathan D. Reid , John H. Sukamto , Yuichi Takada
- 申请人: Eric G. Webb , Jonathan D. Reid , John H. Sukamto , Yuichi Takada
- 申请人地址: US CA San Jose
- 专利权人: Novellus Systems, Inc.
- 当前专利权人: Novellus Systems, Inc.
- 当前专利权人地址: US CA San Jose
- 代理商 Thomas Swenson
- 主分类号: C25D3/38
- IPC分类号: C25D3/38 ; C25D5/02
摘要:
An electroplating solution contains a wetting agent in addition to a suppressor and an accelerator. In some embodiments, the solution has a cloud point temperature greater than 35° C. to avoid precipitation of wetting agent or other solute out of the plating solution. In some embodiments, the wetting agent decreases the air-liquid surface tension of the electroplating solution to 60 dyne/cm2 or less to increase the wetting ability of the solution with a substrate surface. In some embodiments of a method for plating metal onto substrate surface, the electroplating solution has a measured contact angle with the substrate surface less than 60 degrees.
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