发明授权
- 专利标题： Method for producing semiconductor device, polishing apparatus, and polishing method
- 专利标题（中）： 半导体装置的制造方法，研磨装置及研磨方法
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申请号： US10759194申请日： 2004-01-20
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公开(公告)号： US07232760B2公开(公告)日： 2007-06-19
- 发明人: Takeshi Nogami , Akira Yoshio , Shuzo Sato
- 申请人： Takeshi Nogami , Akira Yoshio , Shuzo Sato
- 申请人地址： JP
- 专利权人： Sony Corporation
- 当前专利权人： Sony Corporation
- 当前专利权人地址： JP
- 代理机构： Rader Fishman & Grauer PLLC
- 代理商 Ronald P. Kananen
- 优先权： JPP11-253605 19990907
- 主分类号： H01L21/302
- IPC分类号： H01L21/302 ; H01L21/461
摘要：
A method for producing a semiconductor device, polishing method, and polishing apparatus, suppressing occurrence of dishing and erosion in a flattening process by polishing of a metal film for constituting an interconnection of a semiconductor device having a multilayer interconnection structure. The production method includes the steps of: forming a passivation film exhibiting an action of inhibiting an electrolytic reaction of a metal at the surface of the metal film; selectively removing the passivation film on a projecting portion so as to expose the projecting portion of the metal film at the surface; removing the exposed projecting portion of the metal film by electrolytic polishing so as to flatten unevenness of the surface of the metal film; and removing the metal film present on an insulation film from the metal film with the flattened surface by electrolytic composite polishing combining electrolytic polishing and mechanical polishing so as to form an interconnection.