Invention Grant
- Patent Title: Gas blowing nozzle of charged particle beam apparatus and charged particle beam apparatus as well as working method
- Patent Title (中): 带电粒子束装置和带电粒子束装置的吹气嘴以及工作方法
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Application No.: US11048962Application Date: 2005-02-02
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Publication No.: US07235783B2Publication Date: 2007-06-26
- Inventor: Takashi Kaito
- Applicant: Takashi Kaito
- Applicant Address: JP
- Assignee: SII NanoTechnology Inc.
- Current Assignee: SII NanoTechnology Inc.
- Current Assignee Address: JP
- Agency: Adams & Wilks
- Priority: JP2004-027565 20040204; JP2005-023022 20050131
- Main IPC: H01J37/30
- IPC: H01J37/30
Abstract:
There are provided a gas blowing nozzle adapted such that, by the fact that a groove-like notch structure has been provided in a side to which a beam IB comes flying in a nozzle tip part of a gas gun used on the occasion of a beam assist deposition or a beam assist etching, the beam IB can pass through an inside of the notch structure, and a charged particle beam apparatus having the gas blowing nozzle 11 as well as a working method.
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