Invention Grant
- Patent Title: Ferroelectric thin film and method for forming the same
- Patent Title (中): 铁电薄膜及其形成方法
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Application No.: US10704745Application Date: 2003-11-12
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Publication No.: US07238388B2Publication Date: 2007-07-03
- Inventor: Yong-kyun Lee , Young-soo Park , June-key Lee
- Applicant: Yong-kyun Lee , Young-soo Park , June-key Lee
- Applicant Address: KR Suwon, Kyungki-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon, Kyungki-do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2002-0083184 20021224
- Main IPC: B05D3/02
- IPC: B05D3/02

Abstract:
A composition for forming a ferroelectric thin film includes: a PZT sol-gel solution including at least one of: a whole or partial hydrolysate of a lead precursor and a whole or partial hydrolyzed and polycondensated product thereof; a whole or partial hydrolysate of a zirconium precursor, a whole or partial hydrolyzed and polycondensated product thereof, and a zirconium complex having at least one hydroxy ion and at least one non-hydrolyzable ligand; and a whole or partial hydrolysate of a titanium precursor, a whole or partial hydrolyzed and polycondensated product thereof, and a titanium complex having at least one hydroxyl ion and at least one non-hydrolyzable ligand; and a Bi2SiO5 sol-gel solution including at least one of: a whole or partial hydrolysate of a silicon precursor and a whole or partial hydrolyzed and polycondensated product thereof, and a resultant obtained by refluxing triphenyl bismuth as a bismuth precursor.
Public/Granted literature
- US20040121492A1 Ferroelectric thin film and method for forming the same Public/Granted day:2004-06-24
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