发明授权
- 专利标题: Ferroelectric thin film and method for forming the same
- 专利标题(中): 铁电薄膜及其形成方法
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申请号: US10704745申请日: 2003-11-12
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公开(公告)号: US07238388B2公开(公告)日: 2007-07-03
- 发明人: Yong-kyun Lee , Young-soo Park , June-key Lee
- 申请人: Yong-kyun Lee , Young-soo Park , June-key Lee
- 申请人地址: KR Suwon, Kyungki-do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon, Kyungki-do
- 代理机构: Lee & Morse, P.C.
- 优先权: KR10-2002-0083184 20021224
- 主分类号: B05D3/02
- IPC分类号: B05D3/02
摘要:
A composition for forming a ferroelectric thin film includes: a PZT sol-gel solution including at least one of: a whole or partial hydrolysate of a lead precursor and a whole or partial hydrolyzed and polycondensated product thereof; a whole or partial hydrolysate of a zirconium precursor, a whole or partial hydrolyzed and polycondensated product thereof, and a zirconium complex having at least one hydroxy ion and at least one non-hydrolyzable ligand; and a whole or partial hydrolysate of a titanium precursor, a whole or partial hydrolyzed and polycondensated product thereof, and a titanium complex having at least one hydroxyl ion and at least one non-hydrolyzable ligand; and a Bi2SiO5 sol-gel solution including at least one of: a whole or partial hydrolysate of a silicon precursor and a whole or partial hydrolyzed and polycondensated product thereof, and a resultant obtained by refluxing triphenyl bismuth as a bismuth precursor.
公开/授权文献
- US20040121492A1 Ferroelectric thin film and method for forming the same 公开/授权日:2004-06-24
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