发明授权
- 专利标题: Substrate treatment method and substrate treatment apparatus
- 专利标题(中): 基板处理方法和基板处理装置
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申请号: US11120242申请日: 2005-05-02
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公开(公告)号: US07241362B2公开(公告)日: 2007-07-10
- 发明人: Kaoru Shimbara , Masaharu Kimura , Takashi Hara
- 申请人: Kaoru Shimbara , Masaharu Kimura , Takashi Hara
- 申请人地址: JP
- 专利权人: Dainippon Screen Mfg. Co., Ltd.
- 当前专利权人: Dainippon Screen Mfg. Co., Ltd.
- 当前专利权人地址: JP
- 代理机构: Ostrolenk, Faber, Gerb & Soffen, LLP
- 优先权: JP2002-218723 20020726; JP2002-218724 20020726; JP2002-281628 20020926; JP2003-083695 20030325; JP2003-083696 20030325
- 主分类号: C23C16/00
- IPC分类号: C23C16/00 ; H01L21/00 ; B25J15/10
摘要:
A substrate treatment method for treating a substrate by supplying a treatment liquid to the substrate while rotating the substrate. The method comprises the steps of: performing a first substrate rotation process for rotating the substrate while clamping the substrate by a first clamping member set; performing a second substrate rotation process after the first substrate rotation step for rotating the substrate while clamping the substrate by the first clamping member set and a second clamping member set provided separately from the first clamping member set; and performing a third substrate rotation process after the second substrate rotation step by unclamping the substrate from the first clamping member set for rotating the substrate while clamping the substrate by the second clamping member set.
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