Invention Grant
- Patent Title: Microbolometer and its manufacturing method
- Patent Title (中): 微量热计及其制造方法
-
Application No.: US10482237Application Date: 2002-06-18
-
Publication No.: US07241998B2Publication Date: 2007-07-10
- Inventor: Michel Vilain
- Applicant: Michel Vilain
- Applicant Address: FR Paris Cedex
- Assignee: Commissariat a l'Energie Atomique
- Current Assignee: Commissariat a l'Energie Atomique
- Current Assignee Address: FR Paris Cedex
- Agency: Brinks, Hofer, Gilson & Lione
- Priority: FR0108552 20010628
- International Application: PCT/FR02/02096 WO 20020618
- International Announcement: WO03/002963 WO 20030109
- Main IPC: G01J5/00
- IPC: G01J5/00

Abstract:
The invention concerns a microbolometer comprising a suspended part containing radiation-sensitive elements and consisting of a set of first zones and a set of second zones, the two sets being superimposed; furthermore, the materials constituting said zones and have thermal expansion coefficients sufficiently different for said suspended part to be deformed under the effect of a rise in temperature to be urged into contact with the substrate when the contact zone reaches a temperature Tc less than the destruction temperature Td of the microbolometer. The invention is applicable to radiation detectors comprising an assembly of such microbolometers, and to various appliances comprising at least such a radiation detector.
Public/Granted literature
- US20040232337A1 Microbolometer and method for making same Public/Granted day:2004-11-25
Information query