发明授权
US07245459B2 Critically exposed lapping of magnetic sensors for target signal output 有权
严重暴露的磁传感器研磨目标信号输出

Critically exposed lapping of magnetic sensors for target signal output
摘要:
Magnetic sensors are fabricated with an initial length that is slightly longer than their finished length. The sensors are then critically lapped and exposed for target signal output. The final target length of the sensors is obtained by first exposing the sensors to a photolithographic process and then directly lapping the excess length from the sensors. The length of sensor material that is removed is in the range of several nanometers. The target end point during lapping may be ascertained by detecting the change in resistance between the sensor and leads in the lapping tool as the excess material is lapped from the sensor.
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