公开(公告)号：US20120091096A1

公开(公告)日：2012-04-19

申请号：US13333109

申请日：2011-12-21

申请人： Qing Dai ,  Dan Saylor Kercher ,  Huey-Ming Tzeng

发明人： Qing Dai ,  Dan Saylor Kercher ,  Huey-Ming Tzeng

IPC分类号： B05D3/14

CPC分类号： G03F7/40 ,  B82Y10/00 ,  G11B5/743 ,  G11B5/82 ,  G11B5/855

摘要： A pattern clean-up for fabrication of patterned media using a forced assembly of molecules is disclosed. E-beam lithography is initially used to write the initial patterned bit media structures, which have size and positioning errors. Nano-sized protein molecules are then forced to assemble of on top of the bits. The protein molecules have a very uniform size distribution and assemble into a lattice structure above the e-beam patterned areas. The protein molecules reduce the size and position errors in e-beam patterned structures. This process cleans the signal from the e-beam lithography and lowers the noise in the magnetic reading and writing. This process may be used to fabricate patterned bit media directly on hard disk, or to create a nano-imprint master for mass production of patterned bit media disks.

摘要翻译： 公开了使用分子的强制组装制造图案化介质的图案清理。 电子束光刻最初用于写入具有尺寸和定位误差的初始图案化的位介质结构。 然后将纳米级蛋白质分子强制装配在顶部的位上。 蛋白质分子具有非常均匀的尺寸分布并且组装成电子束图案区域上方的晶格结构。 蛋白质分子减小电子束图案结构中的尺寸和位置误差。 该过程清除电子束光刻中的信号，并降低磁读取和写入中的噪声。 该过程可用于直接在硬盘上制造图案化的位介质，或者用于创建用于批量生产图案化位媒体盘的纳米压印母版。

公开(公告)号：US20060000079A1

公开(公告)日：2006-01-05

申请号：US10881581

申请日：2004-06-30

申请人： Meng Ding ,  Kuok Ho ,  Tsann Lin ,  Huey-Ming Tzeng

发明人： Meng Ding ,  Kuok Ho ,  Tsann Lin ,  Huey-Ming Tzeng

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3166 ,  G11B5/3169 ,  G11B5/3173 ,  G11B5/3903 ,  Y10T29/49041 ,  Y10T29/49046 ,  Y10T29/49052

摘要： One illustrative method of fabricating a read sensor of a magnetic head includes the steps of forming a plurality of read sensor layers on a wafer; etching the read sensor layers to form a read sensor structure with a trench in front of the read sensor structure; forming a highly porous material within the trench; and slicing the wafer and lapping the sliced wafer through the highly porous material until an air bearing surface (ABS) of the magnetic head is reached. Advantageously, the highly porous material in front of the read sensor structure reduces mechanical stress on the read sensor during the lapping process. This reduces the likelihood that the amplitude of the read sensor will be degraded or set in a “flipped” or reversed orientation, as well as reduces the likelihood that electrostatic discharge (ESD) damage to the read sensor will occur.

摘要翻译： 一种制造磁头的读取传感器的说明性方法包括以下步骤：在晶片上形成多个读取传感器层; 蚀刻读取的传感器层以形成读取的传感器结构，其中在传感器结构的前面具有沟槽; 在沟槽内形成高度多孔的材料; 并切片晶片并通过高度多孔材料研磨切片的晶片，直到达到磁头的空气轴承表面（ABS）。 有利地，在读取传感器结构前面的高度多孔材料在研磨过程中减小了读取传感器上的机械应力。 这降低了读取传感器的幅度将被降级或设置为“翻转”或反向取向的可能性，并且降低了对读取传感器的静电放电（ESD）损坏将发生的可能性。

公开(公告)号：US06939200B2

公开(公告)日：2005-09-06

申请号：US10663606

申请日：2003-09-16

申请人： Jacey Robert Beaucage ,  Paul Arthur Goddu ,  Huey-Ming Tzeng

发明人： Jacey Robert Beaucage ,  Paul Arthur Goddu ,  Huey-Ming Tzeng

IPC分类号： B24B49/00 ,  B24B51/00 ,  B49D1/00

CPC分类号： B24B51/00 ,  B24B49/00

摘要： A method of predicting the lapping property of a charged lapping plate uses samples with a known lap surface. The samples are lapped on the plate and a non-invasive sensor is used to determine the lapping rate under a fixed load and rotation speed. The total frictional force of the samples is measured during the lapping to calculate the friction and Preston coefficients of the plate. The samples are held in place while the plate rotates and the sensor measures the distance to the plate. The plate rotates for a specific time so that adequate removal of the pad material has occurred. The lapping rate is determined from a change in the gap distance over a time interval. The lapping rate and friction are then assessed to determine if the plate is lapping worthy.

摘要翻译： 预测充电研磨板的研磨性能的方法使用具有已知搭接表面的样品。 将样品在板上重叠，并使用非侵入式传感器来确定在固定载荷和转速下的研磨速率。 在研磨期间测量样品的总摩擦力，以计算板的摩擦系数和Preston系数。 样品在板旋转时保持就位，传感器测量到板的距离。 板旋转特定时间，以便发生垫材料的充分移除。 研磨速度由间隔时间间隔的变化确定。 然后评估研磨速率和摩擦力以确定板材是否正在研磨。

公开(公告)号：US20050063103A1

公开(公告)日：2005-03-24

申请号：US10666679

申请日：2003-09-19

申请人： Meng Ding ,  Kuok Ho ,  Tsann Lin ,  Huey-Ming Tzeng

发明人： Meng Ding ,  Kuok Ho ,  Tsann Lin ,  Huey-Ming Tzeng

IPC分类号： B24B37/04 ,  B24B49/10 ,  G11B5/39 ,  G11B5/33 ,  B24B49/00 ,  B24B51/00 ,  G11B5/127

CPC分类号： B24B37/013 ,  B24B49/10 ,  G11B5/39 ,  Y10T29/49041 ,  Y10T29/49046 ,  Y10T29/49048

摘要： A method of forming an embedded read element is used in the fabrication process of a magnetic head assembly including write and read heads. In this method, three photolithographic patterning steps are applied for defining the designed height of the embedded read element, defining its designed width, and connecting it with conducting layers, respectively. An in-line lapping guide is also formed with a spacing in front of the embedded read element. In this method, two mechanical lapping steps are applied, one monitored by measuring the resistance of a parallel circuit of the embedded read element and the in-line lapping guide, and the other monitored by measuring the GMR response of the embedded read element.

摘要翻译： 在包括写入和读取头的磁头组件的制造过程中使用形成嵌入式读取元件的方法。 在该方法中，应用三个光刻图案步骤来定义嵌入式读取元件的设计高度，限定其设计宽度，并将其与导电层连接。 在嵌入式读取元件的前面还形成有间距的在线研磨引导件。 在这种方法中，应用了两个机械研磨步骤，一个通过测量嵌入式读取元件的并联电路的电阻和在线研磨导轨进行监测，另一个通过测量嵌入式读取元件的GMR响应进行监测。

公开(公告)号：US06728067B2

公开(公告)日：2004-04-27

申请号：US09918699

申请日：2001-07-30

申请人： Linden James Crawforth ,  Huey-Ming Tzeng ,  Xiao Wu

发明人： Linden James Crawforth ,  Huey-Ming Tzeng ,  Xiao Wu

IPC分类号： G11B560

CPC分类号： G11B5/60

摘要： A slider of a magnetic hard disk drive has one or more electric lapping guides in immediate proximity to the read/write stack of the slider. The lapping guides remain part of the slider during its operation. In the preferred embodiment, two essentially identical lapping guides are symmetrically placed on a slider back. One write head terminal is utilized to conductively access the two lapping guides on one side such that only one additional terminal has to be placed on the slider back together with corresponding leads. The placement of lapping guides on the slider back face provides for an economic lapping of individual sliders with increased precision and reliability regardless of any lapping plane skew.

摘要翻译： 磁性硬盘驱动器的滑动器具有紧邻滑块的读/写栈的一个或多个电研磨导轨。 研磨导轨在其操作期间保持滑块的一部分。 在优选实施例中，两个基本相同的研磨导轨对称地放置在滑块背上。 一个写头终端用于导电地访问一侧的两个研磨引导件，使得只有一个附加端子必须与相应的引线一起放置在滑块背上。 将研磨导轨放置在滑块背面上可以提供单独滑块的经济研磨，具有更高的精度和可靠性，而不管任何研磨平面偏斜。

公开(公告)号：US20080007872A1

公开(公告)日：2008-01-10

申请号：US11901748

申请日：2007-09-19

申请人： Richard Bunch ,  Jeffrey Lille ,  Huey-Ming Tzeng

发明人： Richard Bunch ,  Jeffrey Lille ,  Huey-Ming Tzeng

IPC分类号： G11B5/60

CPC分类号： G11B5/6005 ,  B24B37/048 ,  G11B5/3106 ,  G11B5/314 ,  G11B5/3163 ,  G11B5/3166 ,  G11B5/3169 ,  G11B5/3173 ,  G11B5/6082 ,  Y10T29/49037

摘要： A process for fabricating sliders with one or more sacrificial structures (extensions) that facilitate lapping to create the air-bearing surface (ABS) is described. Prior to separating individual sliders from a wafer, a mask outlines a sacrificial extension around portions of the magnetic transducer elements that are nearest the predetermined plane which will become the ABS. The sacrificial extension extends below the predetermined ABS plane. When the sliders are individually separated by DRIE, the shape of the mask including the sacrificial extension is projected down into and along the slider body. In one embodiment, a channel is disposed on the side of the slider opposite the ABS to provide space for the sacrificial extension of the adjacent slider and allow the sliders to be spaced closer together on the wafer surface for more efficient use of the wafer during head fabrication.

摘要翻译： 描述了一种用于制造具有一个或多个牺牲结构（延伸部分）的滑块的方法，其便于研磨以产生空气轴承表面（ABS）。 在将各个滑块与晶片分开之前，掩模围绕最靠近将成为ABS的预定平面的磁换能器元件周围的牺牲延伸。 牺牲延伸部延伸到预定的ABS平面以下。 当滑块由DRIE单独分开时，包括牺牲延伸部分的面罩的形状向下突出并沿着滑块体。 在一个实施例中，通道设置在与ABS相对的滑块的侧面上，以为相邻滑块的牺牲延伸提供空间，并允许滑块在晶片表面上更靠近在一起，以在头部期间更有效地使用晶片 制造。

公开(公告)号：US20070266549A1

公开(公告)日：2007-11-22

申请号：US11436966

申请日：2006-05-16

申请人： Hardayal Singh Gill ,  Wipul Pemsiri Jayasekara ,  Huey-Ming Tzeng ,  Xiao Z. Wu

发明人： Hardayal Singh Gill ,  Wipul Pemsiri Jayasekara ,  Huey-Ming Tzeng ,  Xiao Z. Wu

IPC分类号： G11B5/127 ,  G11B5/33

CPC分类号： G11B5/3909 ,  B82Y10/00 ,  B82Y25/00 ,  B82Y40/00 ,  G01R33/093 ,  G11B5/3163 ,  G11B5/3169 ,  G11B5/3906 ,  G11B2005/3996 ,  H01F10/3254 ,  H01F10/3268 ,  H01F41/308 ,  Y10T29/49039 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048

摘要： An improved method for the manufacture of magnetoresistive multilayer sensors is disclosed. The method is particularly advantageous for the production of magnetic tunnel junction (MTJ) sensors, which can be damaged at the air bearing surface by conventional lapping and ion milling. The disclosed process protects the ABS of the magnetoresistive sensor by depositing a diamond like carbon layer which remains in place through ion milling. The DLC layer is removed by oxidation subsequent to the formation of the ABS.

摘要翻译： 公开了用于制造磁阻多层传感器的改进方法。 该方法对于生产磁性隧道结（MTJ）传感器是特别有利的，其可以通过常规研磨和离子铣削在空气轴承表面处损坏。 所公开的方法通过沉积通过离子铣削保持就位的类金刚石碳层来保护磁阻传感器的ABS。 在形成ABS之后，通过氧化去除DLC层。

公开(公告)号：US07291279B2

公开(公告)日：2007-11-06

申请号：US10835807

申请日：2004-04-30

申请人： Frederick Hayes Dill ,  Meng Ding ,  Kuok San Ho ,  Jordan Asher Katine ,  Scott Arthur MacDonald ,  Huey-Ming Tzeng

发明人： Frederick Hayes Dill ,  Meng Ding ,  Kuok San Ho ,  Jordan Asher Katine ,  Scott Arthur MacDonald ,  Huey-Ming Tzeng

IPC分类号： B44C1/22 ,  H01L21/00 ,  G11B5/33 ,  G11B5/127

CPC分类号： G11B5/3906 ,  G11B5/3163 ,  G11B5/40 ,  Y10T29/49021 ,  Y10T29/49043 ,  Y10T29/49048

摘要： A method of making a read sensor while protecting it from electrostatic discharge (ESD) damage involves forming a severable shunt during the formation of the read sensor. The method may include forming a resist layer over a plurality of read sensor layers; performing lithography with use of a mask to form the resist layer into a patterned resist which exposes left and right side regions over the read sensor layers as well as a shunt region; etching, with the patterned resist in place, to remove materials in the left and right side regions and in the shunt region; and depositing, with the patterned resist in place, left and right hard bias and lead layers in the left and right side regions, respectively, and in the shunt region for forming a severable shunt which electrically couples the left and right hard bias and lead layers together for ESD protection.

摘要翻译： 制造读取传感器同时防止静电放电（ESD）损坏的方法包括在形成读取的传感器期间形成可分离的分流。 该方法可以包括在多个读取传感器层上形成抗蚀剂层; 使用掩模执行光刻以将抗蚀剂层形成图案化的抗蚀剂，其在读取的传感器层以及分流区域上暴露左侧区域和右侧区域; 蚀刻，图案化抗蚀剂就位，以去除左右侧区域和分流区域中的材料; 并且分别在左侧区域和右侧区域以及分流区域中分别将图案化的抗蚀剂沉积在左侧和右侧的硬偏压和引线层，以形成可分离的分流器，其将左右硬偏压和引线层电耦合 一起为ESD保护。

公开(公告)号：US07062838B2

公开(公告)日：2006-06-20

申请号：US10666679

申请日：2003-09-19

申请人： Meng Ding ,  Kuok San Ho ,  Tsann Lin ,  Huey-Ming Tzeng

发明人： Meng Ding ,  Kuok San Ho ,  Tsann Lin ,  Huey-Ming Tzeng

IPC分类号： G11B5/187 ,  H01F7/06

CPC分类号： B24B37/013 ,  B24B49/10 ,  G11B5/39 ,  Y10T29/49041 ,  Y10T29/49046 ,  Y10T29/49048

摘要： A method of forming an embedded read element is used in the fabrication process of a magnetic head assembly including write and read heads. In this method, three photolithographic patterning steps are applied for defining the designed height of the embedded read element, defining its designed width, and connecting it with conducting layers, respectively. An in-line lapping guide is also formed with a spacing in front of the embedded read element. In this method, two mechanical lapping steps are applied, one monitored by measuring the resistance of a parallel circuit of the embedded read element and the in-line lapping guide, and the other monitored by measuring the GMR response of the embedded read element.

摘要翻译： 在包括写入和读取头的磁头组件的制造过程中使用形成嵌入式读取元件的方法。 在该方法中，应用三个光刻图案步骤来定义嵌入式读取元件的设计高度，限定其设计宽度，并将其与导电层连接。 在嵌入式读取元件的前面还形成有间距的在线研磨引导件。 在这种方法中，应用了两个机械研磨步骤，一个通过测量嵌入式读取元件的并联电路的电阻和在线研磨导轨进行监测，另一个通过测量嵌入式读取元件的GMR响应进行监测。

公开(公告)号：US20060068685A1

公开(公告)日：2006-03-30

申请号：US10954868

申请日：2004-09-30

申请人： Marie-Claire Cyrille ,  Kuok San Ho ,  Tsann Lin ,  Scott MacDonald ,  Huey-Ming Tzeng

发明人： Marie-Claire Cyrille ,  Kuok San Ho ,  Tsann Lin ,  Scott MacDonald ,  Huey-Ming Tzeng

IPC分类号： B24B49/00

CPC分类号： B24B37/00 ,  B24B37/013 ,  B24B41/06 ,  B24B49/10 ,  Y10T29/49036 ,  Y10T29/49048

摘要： An in-line lapping guide uses a contiguous resistor in a cavity to separate a lithographically-defined sensor from the in-line lapping guide. As lapping proceeds through the cavity toward the sensor, the resistance across the sensor leads increases to a specific target, thereby indicating proximity to the sensor itself. The contiguous resistor is fabricated electrically in parallel to the sensor and the in-line lapping guide. The total resistance across the sensor leads show resistance change even when lapping through the cavity portion. One method to produce the contiguous resistor is to partial mill the cavity between the sensor and the in-line lapping guide so that a film of metal is left. Total resistance across leads is the parallel resistance of the sensor, the contiguous resistor, and the in-line lapping guide.

摘要翻译： 在线研磨引导件使用空腔中的连续电阻器将光刻定影传感器与在线研磨导轨分离。 当研磨通过腔朝向传感器进行时，传感器引线上的电阻增加到特定目标，从而指示传感器本身的接近度。 连续的电阻器与传感器和在线研磨导轨平行地制造。 传感器引线上的总电阻即使在通过空腔部分研磨时也会显示电阻变化。 产生连续电阻器的一种方法是将传感器和在线研磨引导件之间的空腔部分研磨以留下金属膜。 引线之间的总电阻是传感器，相邻电阻器和在线研磨导轨的并联电阻。