发明授权
- 专利标题： Method of forming a via in a microfabricated elastomer structure
- 专利标题（中）： 在微制造的弹性体结构中形成通孔的方法
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申请号： US11111264申请日： 2005-04-20
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公开(公告)号： US07250128B2公开(公告)日： 2007-07-31
- 发明人: Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake , Jian Liu , Mark L. Adams , Carl L. Hansen
- 申请人： Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake , Jian Liu , Mark L. Adams , Carl L. Hansen
- 申请人地址： US CA Pasadena
- 专利权人： California Institute of Technology
- 当前专利权人： California Institute of Technology
- 当前专利权人地址： US CA Pasadena
- 代理机构： Townsend and Townsend and Crew LLP
- 主分类号： B29C39/02
- IPC分类号： B29C39/02
摘要：
A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
公开/授权文献
- US20060054228A1 Microfabricated elastomeric valve and pump systems 公开/授权日：2006-03-16
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