Invention Grant
- Patent Title: Beam splitter/combiner for optical metrology tool
- Patent Title (中): 用于光学计量工具的光束分离器/组合器
-
Application No.: US11334999Application Date: 2006-01-19
-
Publication No.: US07251036B2Publication Date: 2007-07-31
- Inventor: James Hendrix , David Wang , Michael Ellison , Joel Ng
- Applicant: James Hendrix , David Wang , Michael Ellison , Joel Ng
- Applicant Address: US CA Fremont
- Assignee: Therma-Wave, Inc.
- Current Assignee: Therma-Wave, Inc.
- Current Assignee Address: US CA Fremont
- Agency: Stallman & Pollock LLP
- Main IPC: G01N21/45
- IPC: G01N21/45

Abstract:
A combiner for optical beams includes a substrate overlaid by a multi-layer dielectric film stack. The substrate is a clear material and the dielectric film stack is a series of alternating layer of high and low refractive index. This gives the combiner relatively high reflectivity across UV wavelengths and relatively high transmissivity in the visible and longer wavelengths and allows visible light to pass through the combiner while UV light is reflected. At the same time dielectric film stack has minimal absorption and scatter. This means that the intensity of visible light maintains at least 90% of its intensity as it passes through combiner and UV light retains at least 90% of its intensity as it is reflected by combiner.
Public/Granted literature
- US20060126071A1 Beam splitter/combiner for optical metrology tool Public/Granted day:2006-06-15
Information query