公开(公告)号：US07280215B2

公开(公告)日：2007-10-09

申请号：US10947925

申请日：2004-09-23

申请人： Alex Salnik ,  Jon Opsal ,  Lena Nicolaides

发明人： Alex Salnik ,  Jon Opsal ,  Lena Nicolaides

IPC分类号： G01N21/55

CPC分类号： G01N21/9501 ,  G01N21/1717 ,  G01N21/636

摘要： The ability of a Modulated Optical Reflectivity (MOR) or Thermal Wave (TW) system to measure characteristics of a sample based on the amplitude and phase of a probe beam reflected from the surface of the sample can be improved by providing a polychromatic pump and/or probe beam that can be scanned over a wide spectral range, such as a range of at least 100 nm. The information contained in the spectral dependencies of a TW response obtained from the sample can be compared and/or fitted to corresponding theoretical dependencies in order to obtain more precise and reliable information about the properties of the particular sample than is available for single-wavelength systems. This information can further be combined with measurements taken for varying spot separations or varying pump source modulation frequency, as well as with photo-thermal radiometry (PTR), spectroscopic reflectometry, and/or ellipsometry measurements.

摘要翻译： 基于从样品表面反射的探针光束的幅度和相位，调制光学反射率（MOR）或热波（TW）系统测量样品的特性的能力可以通过提供多色泵和/ 或可以在宽光谱范围（例如至少100nm的范围）上扫描的探测光束。 包含在从样本获得的TW响应的频谱相关性中的信息可以与相应的理论依赖性进行比较和/或拟合，以获得关于特定样品的性质的更精确和可靠的信息，而不是可用于单波长系统 。 该信息可以进一步与用于变化的点分离或变化的泵浦源调制频率以及光热辐射测量（PTR），光谱反射测量和/或椭偏仪测量的测量结合。

公开(公告)号：US07224461B2

公开(公告)日：2007-05-29

申请号：US10847423

申请日：2004-05-17

申请人： Stephen J. Morris

发明人： Stephen J. Morris

IPC分类号： G01N21/55

CPC分类号： G01N21/211

摘要： A method for modeling the complex refractive index of doped, strained or ultra-thin semiconductors starts with a model for a standard bulk material which may be in any form such as a pre-existing lookup table, a dispersion model derived from an effective medium approximation (EMA) or a critical point (CP) model. The modeling method perturbs the ∈2 curve of the bulk material by enhancing, suppressing or shifting the strong features of the curve. A Kramers-Kronig transformation is then applied to the ∈2 perturbation to obtain the corresponding perturbation to the ∈1 curve. The combination of the perturbed ∈2 curve and the correspondingly perturbed ∈1 curve are then used to obtain the complex dielectric function or complex refractive index of the modified material.

摘要翻译： 用于对掺杂，应变或超薄半导体的复折射率进行建模的方法从用于标准散装材料的模型开始，其可以是任何形式，例如预先存在的查找表，从有效介质近似导出的色散模型 （EMA）或临界点（CP）模型。 该建模方法通过增强，抑制或移动曲线的强特征来扰乱散装材料的∈2 曲线。 然后将Kramers-Kronig变换应用于∈2π扰动，以获得对Λ1 曲线的对应扰动。 然后使用扰动的ζ2曲线和相应的扰动∈1 曲线的组合来获得修饰材料的复合介电函数或复折射率。

公开(公告)号：US07061627B2

公开(公告)日：2006-06-13

申请号：US10385863

申请日：2003-03-11

申请人： Jon Opsal ,  Allan Rosencwaig

发明人： Jon Opsal ,  Allan Rosencwaig

IPC分类号： G01B11/30

CPC分类号： G03F7/70625 ,  G03F7/70633

摘要： A method for analyzing asymmetric structures (including isolated and periodic structures) includes a split detector for use in a broadband spectrometer. The split has detector has separate right and left halves. By independently measuring and comparing the right and left scattered rays, information about asymmetries can be determined.

摘要翻译： 用于分析不对称结构（包括隔离和周期性结构）的方法包括用于宽带光谱仪的分离检测器。 分体检测器具有单独的左右两半。 通过独立测量和比较右和左散射光线，可以确定关于不对称性的信息。

公开(公告)号：US07050179B2

公开(公告)日：2006-05-23

申请号：US10791256

申请日：2004-03-02

申请人： John J. Sidorowich

发明人： John J. Sidorowich

IPC分类号： G01B11/28 ,  G06K9/00

CPC分类号： G06K9/6229 ,  G01N21/8422 ,  G01N21/9501 ,  G06N3/126

摘要： An optical measuring device generates a plurality of measured optical data from inspection of a thin film stack. The measured optical data group naturally into several domains. In turn the thin film parameters associated with the data fall into two categories: local and global. Local “genes” represent parameters that are associated with only one domain, while global genes represent parameters that are associated with multiple domains. A processor evolves models for the data associated with each domain, which models are compared to the measured data, and a “best fit” solution is provided as the result. Each model of theoretical data is represented by an underlying “genotype” which is an ordered set of the genes. For each domain a “population” of genotypes is evolved through the use of a genetic algorithm. The global genes are allowed to “migrate” among multiple domains during the evolution process. Each genotype has a fitness associated therewith based on how much the theoretical data predicted by the genotype differs from the measured data. During the evolution process, individual genotypes are selected based on fitness, then a genetic operation is performed on the selected genotypes to produce new genotypes. Multiple generations of genotypes are evolved until an acceptable solution is obtained or other termination criterion is satisfied.

公开(公告)号：US07027158B2

公开(公告)日：2006-04-11

申请号：US10229630

申请日：2002-08-28

申请人： James Hendrix ,  David Wang ,  Michael Ellison ,  Joel Ng

发明人： James Hendrix ,  David Wang ,  Michael Ellison ,  Joel Ng

IPC分类号： G01N21/45

CPC分类号： G01B11/0625 ,  G01N21/211 ,  G01N21/255 ,  G01N21/55 ,  G01N21/9501

摘要： A combiner for optical beams includes a substrate overlaid by a multi-layer dielectric film stack. The substrate is a clear material and the dielectric film stack is a series of alternating layer of high and low refractive index. This gives the combiner relatively high reflectivity across UV wavelengths and relatively high transmissivity in the visible and longer wavelengths and allows visible light to pass through the combiner while UV light is reflected. At the same time dielectric film stack has minimal absorption and scatter. This means that the intensity of visible light maintains at least 90% of its intensity as it passes through combiner and UV light retains at least 90% of its intensity as it is reflected by combiner.

公开(公告)号：US06952261B2

公开(公告)日：2005-10-04

申请号：US10403489

申请日：2003-03-31

申请人： Martin Ebert

发明人： Martin Ebert

IPC分类号： G01J4/00 ,  G01N21/21 ,  G01N21/95

CPC分类号： G01N21/211 ,  G01J4/00 ,  G01N21/9501

摘要： An ellipsometer includes a light source for generating a probe beam of polychromatic light for interacting with a sample. The probe beam is passed through a first polarizer that imparts a known polarization state to the probe beam. The polarized probe beam is then directed to reflect from the sample. A second illumination source is switched on and off at a predetermined frequency to create an intensity modulated pump beam (the beam may also be chopped). The pump beam is directed normally against the subject producing a small illumination spot within the area illuminated by the probe beam. The pump induces localized changes in the dielectric properties of the subject. The pump-beam induced oscillations are picked up by the portion of the probe beam that is reflected from within the illumination spot of the pump beam. By analyzing only the portion of the reflected probe beam that includes the pump beam induced oscillation, the size of the measurement spot is effectively limited to the illumination spot size of the normally directed pump beam.

摘要翻译： 椭偏仪包括用于产生用于与样品相互作用的多色光的探测光束的光源。 探测光束通过第一偏振器，其将已知的偏振状态赋予探测光束。 然后将极化探针光束引导从样品反射。 第二照明源以预定的频率被打开和关闭以产生强度调制的泵浦光束（该光束也可以被切碎）。 泵浦光束正常地对准对象，从而在由探测光束照射的区域内产生小的照明点。 泵引起受试者的介电性质的局部变化。 泵浦光束感应振荡由从泵浦光束的照明光点内反射的探测光束的部分拾取。 通过仅分析包括泵浦光束振荡的反射的探测光束的部分，测量光斑的尺寸被有效地限制在正向定向的泵浦光束的照明光斑尺寸上。

公开(公告)号：US06919958B2

公开(公告)日：2005-07-19

申请号：US10397917

申请日：2003-03-26

申请人： Fred E. Stanke ,  Clinton B. Carlisle ,  Hung Van Pham ,  Edric Tong ,  Douglas E. Ruth ,  James M. Cahill, Jr. ,  Michael Weber-Grabau ,  Elliot Burke ,  Adam E. Norton

发明人： Fred E. Stanke ,  Clinton B. Carlisle ,  Hung Van Pham ,  Edric Tong ,  Douglas E. Ruth ,  James M. Cahill, Jr. ,  Michael Weber-Grabau ,  Elliot Burke ,  Adam E. Norton

IPC分类号： B24B49/12 ,  G01B11/06 ,  G01B11/30 ,  G01N21/21 ,  G01N21/95 ,  H01L21/66 ,  H01L21/67 ,  G01N21/88

CPC分类号： H01L21/67 ,  B24B49/12 ,  G01B11/0625 ,  G01B11/30 ,  G01N21/211 ,  H01L22/12

摘要： This invention is an apparatus for imaging metrology, which in particular embodiments may be integrated with a processor station such that a metrology station is apart from but coupled to a process station. The metrology station is provided with a first imaging camera with a first field of view containing the measurement region. Alternate embodiments include a second imaging camera with a second field of view. Preferred embodiments comprise a broadband ultraviolet light source, although other embodiments may have a visible or near infrared light source of broad or narrow optical bandwidth. Embodiments including a broad bandwidth source typically include a spectrograph, or an imaging spectrograph. Particular embodiments may include curved, reflective optics or a measurement region wetted by a liquid. In a typical embodiment, the metrology station and the measurement region are configured to have 4 degrees of freedom of movement relative to each other.

摘要翻译： 本发明是一种用于成像测量的装置，其在特定实施例中可以与处理器站集成，使得计量站离开处理站而不是耦合到处理站。 计量站设置有具有包含测量区域的第一视野的第一成像照相机。 替代实施例包括具有第二视野的第二成像相机。 优选实施例包括宽带紫外光源，但是其他实施例可以具有宽或窄光带宽的可见光或近红外光源。 包括宽带宽源的实施例通常包括光谱仪或成像光谱仪。 具体实施例可以包括弯曲的，反射光学的或由液体润湿的测量区域。 在典型的实施例中，计量站和测量区域被配置为具有相对于彼此的4个移动自由度。

公开(公告)号：US06882413B2

公开(公告)日：2005-04-19

申请号：US10144288

申请日：2002-05-13

申请人： Barry R. Bowman

发明人： Barry R. Bowman

IPC分类号： G01N21/21 ,  G01N21/00

CPC分类号： G01N21/211

摘要： An ellipsometric apparatus provides a rotating focused probe beam directed to impinge a sample in any direction. A rotating stage rotates the wafer into a linear travel range defined by a single linear axis of a single linear stage. As a result, an entire wafer is accessed for measurement with the single linear stage having a travel range of only half the wafer diameter. The reduced single linear travel results in a small travel envelope occupied by the wafer and consequently in a small footprint of the apparatus. The use of a rotating probe beam permits measurement of periodic structures along a preferred direction while permitting the use of a single reduced motion stage.

摘要翻译： 椭偏仪提供了一个旋转的聚焦探针光束，该探针光束指向一个样品在任何方向上。 旋转台将晶片旋转成由单个线性平台的单个线性轴限定的线性行程范围。 结果，使用整个晶片进行测量，单个线性平台的行程范围仅为晶片直径的一半。 减小的单线性行程导致由晶片占据的小行程信封，因此在该设备的小占地面积内。 使用旋转探针光束允许沿着优选方向测量周期性结构，同时允许使用单个减小运动级。

公开(公告)号：US06867870B1

公开(公告)日：2005-03-15

申请号：US10262722

申请日：2002-10-02

申请人： Mihail Mihaylov ,  Dale Lindseth

发明人： Mihail Mihaylov ,  Dale Lindseth

IPC分类号： G01B11/24

CPC分类号： G01B11/24

摘要： A detector network for an optical metrology system includes an analog to digital converter for each photodetector or detector array. Each analog to digital converter is connected to provide digitally encoded output from its associated detector. Each analog to digital converter is also connected to a hub. The hub receives commands from a processor and distributes them to the analog to digital converters. The converters sample the output of their associated detectors and return the digitized results to the hub. In turn, the hub passes the digitized results to the processor for analysis.

摘要翻译： 用于光学测量系统的检测器网络包括用于每个光电检测器或检测器阵列的模数转换器。 每个模数转换器被连接以从其相关联的检测器提供数字编码的输出。 每个模数转换器也连接到集线器。 集线器从处理器接收命令并将其分配给模数转换器。 转换器对其相关检测器的输出进行采样，并将数字化结果返回到集线器。 反过来，集线器将数字化结果传递给处理器进行分析。

公开(公告)号：US06867866B1

公开(公告)日：2005-03-15

申请号：US10212385

申请日：2002-08-05

申请人： Yia Chung Chang ,  Hanyou Chu ,  Jon Opsal

发明人： Yia Chung Chang ,  Hanyou Chu ,  Jon Opsal

IPC分类号： G01B11/00 ,  G01N21/47 ,  G01N31/00

CPC分类号： G01N21/4788

摘要： A method for modeling optical scattering includes an initial step of defining a zero-th order structure (an idealized representation) for a subject including a perturbation domain and a background material. A Green's function and a zero-th order wave function are obtained for the zero-th order structure using rigorous coupled wave analysis (RCWA). A Lippmann-Schwinger equation is constructed including the Green's function, zero-th order wave function and a perturbation function. The Lippmann-Schwinger equation is then evaluated over a selected set of mesh points within the perturbation domain. The resulting linear equations are solved to compute one or more reflection coefficients for the subject.