发明授权
- 专利标题: Beam splitter/combiner for optical metrology tool
- 专利标题(中): 用于光学计量工具的光束分离器/组合器
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申请号: US11334999申请日: 2006-01-19
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公开(公告)号: US07251036B2公开(公告)日: 2007-07-31
- 发明人: James Hendrix , David Wang , Michael Ellison , Joel Ng
- 申请人: James Hendrix , David Wang , Michael Ellison , Joel Ng
- 申请人地址: US CA Fremont
- 专利权人: Therma-Wave, Inc.
- 当前专利权人: Therma-Wave, Inc.
- 当前专利权人地址: US CA Fremont
- 代理机构: Stallman & Pollock LLP
- 主分类号: G01N21/45
- IPC分类号: G01N21/45
摘要:
A combiner for optical beams includes a substrate overlaid by a multi-layer dielectric film stack. The substrate is a clear material and the dielectric film stack is a series of alternating layer of high and low refractive index. This gives the combiner relatively high reflectivity across UV wavelengths and relatively high transmissivity in the visible and longer wavelengths and allows visible light to pass through the combiner while UV light is reflected. At the same time dielectric film stack has minimal absorption and scatter. This means that the intensity of visible light maintains at least 90% of its intensity as it passes through combiner and UV light retains at least 90% of its intensity as it is reflected by combiner.
公开/授权文献
- US20060126071A1 Beam splitter/combiner for optical metrology tool 公开/授权日:2006-06-15
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