发明授权
US07254510B2 Smart component-based management techniques in a substrate processing system
有权
基于基于组件的管理技术在基板处理系统中的应用
- 专利标题: Smart component-based management techniques in a substrate processing system
- 专利标题(中): 基于基于组件的管理技术在基板处理系统中的应用
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申请号: US11498544申请日: 2006-08-02
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公开(公告)号: US07254510B2公开(公告)日: 2007-08-07
- 发明人: Neil Benjamin , Richard Alan Gottscho , Nicolas Bright , Robert Steger
- 申请人: Neil Benjamin , Richard Alan Gottscho , Nicolas Bright , Robert Steger
- 申请人地址: US CA Fremont
- 专利权人: Lam Research Corporation
- 当前专利权人: Lam Research Corporation
- 当前专利权人地址: US CA Fremont
- 代理机构: IP Strategy Group, P.C.
- 主分类号: G06F19/00
- IPC分类号: G06F19/00
摘要:
A method of component management in a substrate processing system is disclosed. The substrate processing system has a set of components, at least a plurality of components of the set of components being designated to be smart components, each component of the plurality of components having an intelligent component enhancement (ICE). The method includes querying the plurality of components to request their respective unique identification data from their respective ICEs. The method further includes receiving unique identification data from the plurality of components if any of the plurality of components responds to the querying. The method additionally includes flagging the first component for corrective action if a first component of the plurality of components fails to provide first component unique identification data when the first component identification data is expected.
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