发明授权
US07265838B1 Method of calibrating effects of multi-AOI-system for easy changing angles-of-incidence in ellipsometers and the like
有权
校准多AOI系统的效果的方法，用于在椭偏仪等中容易改变入射角
- 专利标题： Method of calibrating effects of multi-AOI-system for easy changing angles-of-incidence in ellipsometers and the like
- 专利标题（中）： 校准多AOI系统的效果的方法，用于在椭偏仪等中容易改变入射角
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申请号： US10925333申请日： 2004-08-24
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公开(公告)号： US07265838B1公开(公告)日： 2007-09-04
- 发明人: Blaine D. Johs , Ping He , Martin M. Liphardt , Christopher A. Goeden , John A. Woollam , James D. Welch
- 申请人： Blaine D. Johs , Ping He , Martin M. Liphardt , Christopher A. Goeden , John A. Woollam , James D. Welch
- 申请人地址： US NE Lincoln
- 专利权人： J.A. Woollam Co., Inc.
- 当前专利权人： J.A. Woollam Co., Inc.
- 当前专利权人地址： US NE Lincoln
- 代理商 James D. Welch
- 主分类号： G01J4/00
- IPC分类号： G01J4/00
摘要：
Disclosed is a system for enabling easy sequential setting of different Angles-of-Incidence of a beam of electromagnetic radiation to a surface of a sample system involving regression based methodology for evaluating and compensating the effects of the presence electromagnetic beam intercepting angle-of-incidence changing systems, including where desired, parameterization of calibration parameters.
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