发明授权
- 专利标题: Polishing composition
- 专利标题(中): 抛光组成
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申请号: US11095564申请日: 2005-04-01
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公开(公告)号: US07267702B2公开(公告)日: 2007-09-11
- 发明人: Yuichi Honma , Kouji Taira , Shigeaki Takashina
- 申请人: Yuichi Honma , Kouji Taira , Shigeaki Takashina
- 申请人地址: JP Tokyo
- 专利权人: Kao Corporation
- 当前专利权人: Kao Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Birch, Stewart, Kolasch & Birch, LLP
- 优先权: JP2004-112410 20040406; JP2004-259986 20040907
- 主分类号: B24B1/00
- IPC分类号: B24B1/00 ; B24B37/00 ; C09G1/02 ; C09G1/04 ; C09K3/14
摘要:
A polishing composition is provided containing an abrasive having an average particle size of from 1 to 30 nm and water, wherein the abrasive has a packing ratio of from 79 to 90% by weight; a method for manufacturing a substrate, including the steps of introducing the above polishing composition between a substrate and a polishing pad, and polishing the substrate, while contacting the substrate with the polishing composition; and a method for reducing scratches of a substrate to be polished, including the step of polishing the substrate to be polished with the above polishing composition. The polishing composition is suitable for polishing substrates for precision parts including, for example, substrates for magnetic recording media, such as magnetic disks, and opto-magnetic disks, photomask substrates, optical disks, optical lenses, optical mirrors, optical prisms and semiconductor substrates, and the like.
公开/授权文献
- US20050221726A1 Polishing composition 公开/授权日:2005-10-06
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