发明授权
- 专利标题: Memory cell and method for manufacturing the same
- 专利标题(中): 存储单元及其制造方法
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申请号: US11162274申请日: 2005-09-05
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公开(公告)号: US07268379B2公开(公告)日: 2007-09-11
- 发明人: Tzu-Hsuan Hsu , Erh-Kun Lai , Hang-Ting Lue , Chia-Hua Ho
- 申请人: Tzu-Hsuan Hsu , Erh-Kun Lai , Hang-Ting Lue , Chia-Hua Ho
- 申请人地址: TW Hsinchu
- 专利权人: MACRONIX International Co., Ltd
- 当前专利权人: MACRONIX International Co., Ltd
- 当前专利权人地址: TW Hsinchu
- 代理机构: Jianq Chyun IP Office
- 主分类号: H01L29/80
- IPC分类号: H01L29/80
摘要:
The invention is directed to a memory cell on a substrate having a plurality of shallow trench isolations form therein, wherein top surfaces of the shallow trench isolations are lower than a top surface of the substrate and the shallow trench isolations together define a vertical fin structure of the substrate. The memory comprises a straddle gate, a carrier trapping layer and at least two source/drain regions. The straddle gate is located on the substrate and straddles over the vertical fin structure. The carrier trapping layer is located between the straddle gate and the substrate. The source/drain regions are located in a portion of the vertical fin structure of the substrate exposed by the straddle gate.
公开/授权文献
- US20070052010A1 MEMORY CELL AND METHOD FOR MANUFACTURING THE SAME 公开/授权日:2007-03-08
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