发明授权
- 专利标题： Tunable gas distribution plate assembly
- 专利标题（中）： 可调气体分配板总成
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申请号： US10337483申请日： 2003-01-07
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公开(公告)号： US07270713B2公开(公告)日： 2007-09-18
- 发明人: Wendell T. Blonigan , John M. White , William A. Bagley
- 申请人： Wendell T. Blonigan , John M. White , William A. Bagley
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Patterson & Sheridan LLP
- 主分类号： C23C16/455
- IPC分类号： C23C16/455 ; C23C16/50 ; C23C16/503 ; C23C16/505 ; C23C16/509 ; C23F1/00 ; H01L21/306
摘要：
A gas distribution plate assembly and a method for distributing gas in a processing chamber are provided. In one embodiment, a gas distribution plate assembly includes a tuning plate coupled to a diffuser plate. The tuning plate has a plurality of orifice holes formed therethrough that align with a plurality of apertures formed through the diffuser plate, where the apertures each have a greater sectional area than the holes in the tuning plate. Each aperture is aligned with a respective hole to define gas passages through the gas distribution plate assembly. The tuning plate may be interchanged with a replacement tuning plate to change the gas flow characteristics through the gas distribution plate assembly.
公开/授权文献
- US20040129211A1 Tunable gas distribution plate assembly 公开/授权日：2004-07-08
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