Invention Grant
US07273764B2 Sensor with at least one micromechanical structure, and method for producing it
有权
具有至少一个微机械结构的传感器及其制造方法
- Patent Title: Sensor with at least one micromechanical structure, and method for producing it
- Patent Title (中): 具有至少一个微机械结构的传感器及其制造方法
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Application No.: US11028370Application Date: 2005-01-03
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Publication No.: US07273764B2Publication Date: 2007-09-25
- Inventor: Frank Reichenbach , Stefan Pinter , Frank Henning , Hans Artmann , Helmut Baumann , Franz Laemer , Michael Offenberg , Georg Bischopink
- Applicant: Frank Reichenbach , Stefan Pinter , Frank Henning , Hans Artmann , Helmut Baumann , Franz Laemer , Michael Offenberg , Georg Bischopink
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agent Michael J. Striker
- Priority: DE19961578 19991221
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
The invention relates to a sensor with at least one silicon-based micromechanical structure, which is integrated with a sensor chamber of a foundation wafer, and with at least one covering that covers the foundation wafer in the region of the sensor chamber, and to a method for producing a sensor. It is provided that in the sensor of the invention, the covering (13) comprises a first layer (32) (deposition layer) that is permeable to an etching medium and the reaction products, and a hermetically sealing second layer (34) (sealing layer) located above it, and that in the method of the invention, at least the sensor chamber (28) present in the foundation wafer (11) after the establishment of the structure (26) is filled with an oxide (30), in particular CVD oxide or porous oxide; the sensor chamber (28) is covered by a first layer (32) (deposition layer), in particular of polysilicon, that is transparent to an etching medium and the reaction products or is retroactively made transparent; the oxide (30) in the sensor chamber (28) is removed through the deposition layer (32) with the etching medium; and next, a second layer (34) (sealing layer), in particular of metal or an insulator, is applied to the deposition layer (32) and hermetically seals off the sensor chamber (28).
Public/Granted literature
- US20050230708A1 Sensor with at least one micromechanical structure, and method for producing it Public/Granted day:2005-10-20
Information query
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