发明授权
- 专利标题: Semiconductor device with increased effective channel length and method of manufacturing the same
- 专利标题(中): 具有增加有效通道长度的半导体器件及其制造方法
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申请号: US10845688申请日: 2004-05-13
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公开(公告)号: US07279741B2公开(公告)日: 2007-10-09
- 发明人: Chang-Hyun Cho , Soo-Ho Shin , Yong-Gyu Choi , Tae-Young Chung
- 申请人: Chang-Hyun Cho , Soo-Ho Shin , Yong-Gyu Choi , Tae-Young Chung
- 申请人地址: KR Suwon-si, Gyeonggi-do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si, Gyeonggi-do
- 代理机构: Marger Johnson & McCollom, P.C.
- 优先权: KR10-2003-0032884 20030523
- 主分类号: H01L29/76
- IPC分类号: H01L29/76
摘要:
A semiconductor device with an increased effective channel length and a method of manufacturing the same. The device includes a semiconductor substrate, a gate insulating layer disposed on the semiconductor substrate, a gate electrode structure disposed on a predetermined portion of the gate insulating layer, an insulating layer for preventing short channel disposed on the surface of the resultant structure where the gate electrode structure is disposed, and a source region and a drain region disposed in the semiconductor substrate on either side of the gate electrode structure. Both the source region and the drain region are spaced apart from the gate electrode structure by the thickness of the insulating layer. The channel length of a MOS transistor can be thereby increased.
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